11/14/2010	2:19:25 AM	Helium MFC set to  100.000000
11/14/2010	2:19:27 AM	Helium valve opened
11/14/2010	2:22:40 AM	Helium valve closed
11/14/2010	2:23:33 AM	Recipe started at 2:23 AM
11/14/2010	2:23:33 AM	Helium valve closed
11/14/2010	2:23:33 AM	BCl3 valve closed
11/14/2010	2:23:33 AM	PH3 valve closed
11/14/2010	2:23:33 AM	SiCl4 pre valve closed
11/14/2010	2:23:33 AM	SiCl4 post valve closed
11/14/2010	2:23:33 AM	Main Vac valve closed
11/14/2010	2:23:33 AM	Bypass valve closed
11/14/2010	2:23:33 AM	Bubbler valve closed
11/14/2010	2:23:33 AM	H2 valve opened
11/14/2010	2:23:33 AM	Helium MFC set to  0.000000
11/14/2010	2:23:33 AM	H2 MFC set to  500.000000
11/14/2010	2:23:33 AM	BCl3 MFC set to  0.000000
11/14/2010	2:23:33 AM	PHl3 MFC set to  0.000000
11/14/2010	2:23:33 AM	SiCl4 MFC set to  0.000000
11/14/2010	2:23:33 AM	Bypass solenoid MFC set to  0.000000
11/14/2010	2:23:33 AM	Tube furnace set to 1000
11/14/2010	2:24:56 AM	Helium valve closed
11/14/2010	2:24:56 AM	BCl3 valve closed
11/14/2010	2:24:56 AM	PH3 valve closed
11/14/2010	2:24:56 AM	SiCl4 pre valve closed
11/14/2010	2:24:56 AM	SiCl4 post valve closed
11/14/2010	2:24:56 AM	Main Vac valve closed
11/14/2010	2:24:56 AM	Bypass valve closed
11/14/2010	2:24:56 AM	H2 valve opened
11/14/2010	2:24:56 AM	Bubbler valve opened
11/14/2010	2:24:56 AM	Helium MFC set to  0.000000
11/14/2010	2:24:56 AM	H2 MFC set to  500.000000
11/14/2010	2:24:56 AM	BCl3 MFC set to  0.000000
11/14/2010	2:24:56 AM	PHl3 MFC set to  0.000000
11/14/2010	2:24:56 AM	SiCl4 MFC set to  0.000000
11/14/2010	2:24:56 AM	Bypass solenoid MFC set to  0.000000
11/14/2010	2:24:57 AM	Tube furnace set to 1000
11/14/2010	2:44:57 AM	Helium valve closed
11/14/2010	2:44:57 AM	PH3 valve closed
11/14/2010	2:44:57 AM	Main Vac valve closed
11/14/2010	2:44:57 AM	Bypass valve closed
11/14/2010	2:44:57 AM	H2 valve opened
11/14/2010	2:44:57 AM	BCl3 valve opened
11/14/2010	2:44:57 AM	SiCl4 pre valve opened
11/14/2010	2:44:57 AM	SiCl4 post valve opened
11/14/2010	2:44:57 AM	Bubbler valve opened
11/14/2010	2:44:57 AM	Helium MFC set to  0.000000
11/14/2010	2:44:57 AM	H2 MFC set to  500.000000
11/14/2010	2:44:57 AM	BCl3 MFC set to  12.000000
11/14/2010	2:44:57 AM	PHl3 MFC set to  0.000000
11/14/2010	2:44:57 AM	SiCl4 MFC set to  50.000000
11/14/2010	2:44:57 AM	Bypass solenoid MFC set to  0.000000
11/14/2010	2:44:57 AM	Tube furnace set to 1000
11/14/2010	2:59:57 AM	Helium valve closed
11/14/2010	2:59:57 AM	BCl3 valve closed
11/14/2010	2:59:57 AM	PH3 valve closed
11/14/2010	2:59:57 AM	SiCl4 pre valve closed
11/14/2010	2:59:57 AM	SiCl4 post valve closed
11/14/2010	2:59:57 AM	Main Vac valve closed
11/14/2010	2:59:57 AM	Bypass valve closed
11/14/2010	2:59:57 AM	H2 valve opened
11/14/2010	2:59:57 AM	Bubbler valve opened
11/14/2010	2:59:57 AM	Helium MFC set to  0.000000
11/14/2010	2:59:57 AM	H2 MFC set to  500.000000
11/14/2010	2:59:57 AM	BCl3 MFC set to  0.000000
11/14/2010	2:59:57 AM	PHl3 MFC set to  0.000000
11/14/2010	2:59:57 AM	SiCl4 MFC set to  0.000000
11/14/2010	2:59:57 AM	Bypass solenoid MFC set to  0.000000
11/14/2010	2:59:57 AM	Tube furnace set to 750
11/14/2010	3:19:57 AM	H2 valve closed
11/14/2010	3:19:57 AM	BCl3 valve closed
11/14/2010	3:19:57 AM	PH3 valve closed
11/14/2010	3:19:57 AM	SiCl4 pre valve closed
11/14/2010	3:19:57 AM	SiCl4 post valve closed
11/14/2010	3:19:57 AM	Main Vac valve closed
11/14/2010	3:19:57 AM	Bypass valve closed
11/14/2010	3:19:57 AM	Helium valve opened
11/14/2010	3:19:57 AM	Bubbler valve opened
11/14/2010	3:19:57 AM	Helium MFC set to  500.000000
11/14/2010	3:19:57 AM	H2 MFC set to  0.000000
11/14/2010	3:19:57 AM	BCl3 MFC set to  0.000000
11/14/2010	3:19:57 AM	PHl3 MFC set to  0.000000
11/14/2010	3:19:57 AM	SiCl4 MFC set to  0.000000
11/14/2010	3:19:57 AM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:19:57 AM	Tube furnace set to 0
11/14/2010	3:32:54 AM	Run aborted at 3:32 AM
11/14/2010	3:32:54 AM	Helium valve closed
11/14/2010	3:32:54 AM	H2 valve closed
11/14/2010	3:32:54 AM	BCl3 valve closed
11/14/2010	3:32:54 AM	PH3 valve closed
11/14/2010	3:32:54 AM	SiCl4 pre valve closed
11/14/2010	3:32:54 AM	SiCl4 post valve closed
11/14/2010	3:32:54 AM	Bypass valve closed
11/14/2010	3:32:54 AM	Main Vac valve closed
11/14/2010	3:32:54 AM	Bubbler valve closed
11/14/2010	3:32:54 AM	Helium MFC set to  0.000000
11/14/2010	3:32:54 AM	H2 MFC set to  0.000000
11/14/2010	3:32:54 AM	BCl3 MFC set to  0.000000
11/14/2010	3:32:54 AM	PHl3 MFC set to  0.000000
11/14/2010	3:32:54 AM	SiCl4 MFC set to  0.000000
11/14/2010	3:32:54 AM	Tube furnace set to 0
11/14/2010	3:32:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	3:32:56 AM	Recipe started at 3:32 AM
11/14/2010	3:32:56 AM	H2 valve closed
11/14/2010	3:32:56 AM	BCl3 valve closed
11/14/2010	3:32:56 AM	PH3 valve closed
11/14/2010	3:32:56 AM	SiCl4 pre valve closed
11/14/2010	3:32:56 AM	SiCl4 post valve closed
11/14/2010	3:32:56 AM	Main Vac valve closed
11/14/2010	3:32:56 AM	Bypass valve closed
11/14/2010	3:32:56 AM	Bubbler valve closed
11/14/2010	3:32:56 AM	Helium valve opened
11/14/2010	3:32:56 AM	Helium MFC set to  500.000000
11/14/2010	3:32:56 AM	H2 MFC set to  0.000000
11/14/2010	3:32:56 AM	BCl3 MFC set to  0.000000
11/14/2010	3:32:56 AM	PHl3 MFC set to  0.000000
11/14/2010	3:32:56 AM	SiCl4 MFC set to  0.000000
11/14/2010	3:32:56 AM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:32:56 AM	Tube furnace set to 0
11/14/2010	3:32:57 AM	Helium valve closed
11/14/2010	3:32:57 AM	H2 valve closed
11/14/2010	3:32:57 AM	BCl3 valve closed
11/14/2010	3:32:57 AM	PH3 valve closed
11/14/2010	3:32:57 AM	SiCl4 pre valve closed
11/14/2010	3:32:57 AM	SiCl4 post valve closed
11/14/2010	3:32:57 AM	Main Vac valve closed
11/14/2010	3:32:57 AM	Bypass valve closed
11/14/2010	3:32:57 AM	Bubbler valve closed
11/14/2010	3:32:57 AM	Helium MFC set to  0.000000
11/14/2010	3:32:57 AM	H2 MFC set to  0.000000
11/14/2010	3:32:57 AM	BCl3 MFC set to  0.000000
11/14/2010	3:32:57 AM	PHl3 MFC set to  0.000000
11/14/2010	3:32:57 AM	SiCl4 MFC set to  0.000000
11/14/2010	3:32:57 AM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:32:57 AM	Tube furnace set to 0
11/14/2010	3:32:57 AM	Run finished at 3:32 AM
11/14/2010	3:32:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	3:38:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	3:38:04 AM	Recipe started at 3:38 AM
11/14/2010	3:38:04 AM	Helium valve closed
11/14/2010	3:38:04 AM	H2 valve closed
11/14/2010	3:38:04 AM	BCl3 valve closed
11/14/2010	3:38:04 AM	PH3 valve closed
11/14/2010	3:38:04 AM	SiCl4 pre valve closed
11/14/2010	3:38:04 AM	SiCl4 post valve closed
11/14/2010	3:38:04 AM	Main Vac valve closed
11/14/2010	3:38:04 AM	Bubbler valve closed
11/14/2010	3:38:04 AM	Bypass valve opened
11/14/2010	3:38:04 AM	Helium MFC set to  0.000000
11/14/2010	3:38:04 AM	H2 MFC set to  0.000000
11/14/2010	3:38:04 AM	BCl3 MFC set to  0.000000
11/14/2010	3:38:04 AM	PHl3 MFC set to  0.000000
11/14/2010	3:38:04 AM	SiCl4 MFC set to  0.000000
11/14/2010	3:38:04 AM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:38:04 AM	Tube furnace set to 0
11/14/2010	3:38:58 AM	Helium valve closed
11/14/2010	3:38:58 AM	H2 valve closed
11/14/2010	3:38:58 AM	BCl3 valve closed
11/14/2010	3:38:58 AM	PH3 valve closed
11/14/2010	3:38:58 AM	SiCl4 pre valve closed
11/14/2010	3:38:58 AM	SiCl4 post valve closed
11/14/2010	3:38:58 AM	Bubbler valve closed
11/14/2010	3:38:58 AM	Main Vac valve opened
11/14/2010	3:38:58 AM	Bypass valve opened
11/14/2010	3:38:58 AM	Helium MFC set to  0.000000
11/14/2010	3:38:58 AM	H2 MFC set to  0.000000
11/14/2010	3:38:58 AM	BCl3 MFC set to  0.000000
11/14/2010	3:38:58 AM	PHl3 MFC set to  0.000000
11/14/2010	3:38:58 AM	SiCl4 MFC set to  0.000000
11/14/2010	3:38:58 AM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:38:58 AM	Tube furnace set to 0
11/14/2010	3:38:58 AM	Run finished at 3:38 AM
11/14/2010	3:38:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	3:39:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	3:39:06 AM	Recipe started at 3:39 AM
11/14/2010	3:39:06 AM	H2 valve closed
11/14/2010	3:39:06 AM	BCl3 valve closed
11/14/2010	3:39:06 AM	PH3 valve closed
11/14/2010	3:39:06 AM	SiCl4 pre valve closed
11/14/2010	3:39:06 AM	SiCl4 post valve closed
11/14/2010	3:39:06 AM	Main Vac valve closed
11/14/2010	3:39:06 AM	Bypass valve closed
11/14/2010	3:39:06 AM	Bubbler valve closed
11/14/2010	3:39:06 AM	Helium valve opened
11/14/2010	3:39:06 AM	Helium MFC set to  500.000000
11/14/2010	3:39:06 AM	H2 MFC set to  0.000000
11/14/2010	3:39:06 AM	BCl3 MFC set to  0.000000
11/14/2010	3:39:06 AM	PHl3 MFC set to  0.000000
11/14/2010	3:39:06 AM	SiCl4 MFC set to  0.000000
11/14/2010	3:39:06 AM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:39:07 AM	Tube furnace set to 0
11/14/2010	3:40:25 AM	Helium valve closed
11/14/2010	3:40:25 AM	H2 valve closed
11/14/2010	3:40:25 AM	BCl3 valve closed
11/14/2010	3:40:25 AM	PH3 valve closed
11/14/2010	3:40:25 AM	SiCl4 pre valve closed
11/14/2010	3:40:25 AM	SiCl4 post valve closed
11/14/2010	3:40:25 AM	Main Vac valve closed
11/14/2010	3:40:25 AM	Bypass valve closed
11/14/2010	3:40:25 AM	Bubbler valve closed
11/14/2010	3:40:25 AM	Helium MFC set to  0.000000
11/14/2010	3:40:25 AM	H2 MFC set to  0.000000
11/14/2010	3:40:25 AM	BCl3 MFC set to  0.000000
11/14/2010	3:40:25 AM	PHl3 MFC set to  0.000000
11/14/2010	3:40:25 AM	SiCl4 MFC set to  0.000000
11/14/2010	3:40:25 AM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:40:25 AM	Tube furnace set to 0
11/14/2010	3:40:25 AM	Run finished at 3:40 AM
11/14/2010	3:40:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	3:40:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	3:40:30 AM	Recipe started at 3:40 AM
11/14/2010	3:40:30 AM	Helium valve closed
11/14/2010	3:40:30 AM	H2 valve closed
11/14/2010	3:40:30 AM	BCl3 valve closed
11/14/2010	3:40:30 AM	PH3 valve closed
11/14/2010	3:40:30 AM	SiCl4 pre valve closed
11/14/2010	3:40:30 AM	SiCl4 post valve closed
11/14/2010	3:40:30 AM	Main Vac valve closed
11/14/2010	3:40:30 AM	Bubbler valve closed
11/14/2010	3:40:30 AM	Bypass valve opened
11/14/2010	3:40:30 AM	Helium MFC set to  0.000000
11/14/2010	3:40:30 AM	H2 MFC set to  0.000000
11/14/2010	3:40:30 AM	BCl3 MFC set to  0.000000
11/14/2010	3:40:30 AM	PHl3 MFC set to  0.000000
11/14/2010	3:40:30 AM	SiCl4 MFC set to  0.000000
11/14/2010	3:40:30 AM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:40:30 AM	Tube furnace set to 0
11/14/2010	3:41:06 AM	Helium valve closed
11/14/2010	3:41:06 AM	H2 valve closed
11/14/2010	3:41:06 AM	BCl3 valve closed
11/14/2010	3:41:06 AM	PH3 valve closed
11/14/2010	3:41:06 AM	SiCl4 pre valve closed
11/14/2010	3:41:06 AM	SiCl4 post valve closed
11/14/2010	3:41:06 AM	Bubbler valve closed
11/14/2010	3:41:06 AM	Main Vac valve opened
11/14/2010	3:41:06 AM	Bypass valve opened
11/14/2010	3:41:06 AM	Helium MFC set to  0.000000
11/14/2010	3:41:06 AM	H2 MFC set to  0.000000
11/14/2010	3:41:06 AM	BCl3 MFC set to  0.000000
11/14/2010	3:41:06 AM	PHl3 MFC set to  0.000000
11/14/2010	3:41:06 AM	SiCl4 MFC set to  0.000000
11/14/2010	3:41:06 AM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:41:07 AM	Tube furnace set to 0
11/14/2010	3:41:07 AM	Run finished at 3:41 AM
11/14/2010	3:41:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	1:59:58 PM	Helium MFC set to  100.000000
11/14/2010	2:00:00 PM	Helium valve opened
11/14/2010	2:04:54 PM	Helium valve closed
11/14/2010	2:05:45 PM	Helium valve opened
11/14/2010	2:09:10 PM	Helium valve closed
11/14/2010	2:09:13 PM	Helium MFC set to  0.000000
11/14/2010	2:10:02 PM	Recipe started at 2:10 PM
11/14/2010	2:10:02 PM	Helium valve closed
11/14/2010	2:10:02 PM	BCl3 valve closed
11/14/2010	2:10:02 PM	PH3 valve closed
11/14/2010	2:10:02 PM	SiCl4 pre valve closed
11/14/2010	2:10:02 PM	SiCl4 post valve closed
11/14/2010	2:10:02 PM	Main Vac valve closed
11/14/2010	2:10:02 PM	Bypass valve closed
11/14/2010	2:10:02 PM	Bubbler valve closed
11/14/2010	2:10:02 PM	H2 valve opened
11/14/2010	2:10:02 PM	Helium MFC set to  0.000000
11/14/2010	2:10:02 PM	H2 MFC set to  500.000000
11/14/2010	2:10:02 PM	BCl3 MFC set to  0.000000
11/14/2010	2:10:02 PM	PHl3 MFC set to  0.000000
11/14/2010	2:10:02 PM	SiCl4 MFC set to  0.000000
11/14/2010	2:10:02 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	2:10:02 PM	Tube furnace set to 1000
11/14/2010	2:11:24 PM	Helium valve closed
11/14/2010	2:11:24 PM	BCl3 valve closed
11/14/2010	2:11:24 PM	PH3 valve closed
11/14/2010	2:11:24 PM	SiCl4 pre valve closed
11/14/2010	2:11:24 PM	SiCl4 post valve closed
11/14/2010	2:11:24 PM	Main Vac valve closed
11/14/2010	2:11:24 PM	Bypass valve closed
11/14/2010	2:11:24 PM	H2 valve opened
11/14/2010	2:11:24 PM	Bubbler valve opened
11/14/2010	2:11:24 PM	Helium MFC set to  0.000000
11/14/2010	2:11:24 PM	H2 MFC set to  500.000000
11/14/2010	2:11:24 PM	BCl3 MFC set to  0.000000
11/14/2010	2:11:24 PM	PHl3 MFC set to  0.000000
11/14/2010	2:11:24 PM	SiCl4 MFC set to  0.000000
11/14/2010	2:11:24 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	2:11:24 PM	Tube furnace set to 1000
11/14/2010	2:31:24 PM	Helium valve closed
11/14/2010	2:31:24 PM	PH3 valve closed
11/14/2010	2:31:24 PM	Main Vac valve closed
11/14/2010	2:31:24 PM	Bypass valve closed
11/14/2010	2:31:24 PM	H2 valve opened
11/14/2010	2:31:24 PM	BCl3 valve opened
11/14/2010	2:31:24 PM	SiCl4 pre valve opened
11/14/2010	2:31:24 PM	SiCl4 post valve opened
11/14/2010	2:31:24 PM	Bubbler valve opened
11/14/2010	2:31:24 PM	Helium MFC set to  0.000000
11/14/2010	2:31:24 PM	H2 MFC set to  500.000000
11/14/2010	2:31:24 PM	BCl3 MFC set to  12.000000
11/14/2010	2:31:24 PM	PHl3 MFC set to  0.000000
11/14/2010	2:31:24 PM	SiCl4 MFC set to  50.000000
11/14/2010	2:31:24 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	2:31:24 PM	Tube furnace set to 1000
11/14/2010	2:51:24 PM	Helium valve closed
11/14/2010	2:51:24 PM	BCl3 valve closed
11/14/2010	2:51:24 PM	PH3 valve closed
11/14/2010	2:51:24 PM	SiCl4 pre valve closed
11/14/2010	2:51:24 PM	SiCl4 post valve closed
11/14/2010	2:51:24 PM	Main Vac valve closed
11/14/2010	2:51:24 PM	Bypass valve closed
11/14/2010	2:51:24 PM	H2 valve opened
11/14/2010	2:51:24 PM	Bubbler valve opened
11/14/2010	2:51:24 PM	Helium MFC set to  0.000000
11/14/2010	2:51:24 PM	H2 MFC set to  500.000000
11/14/2010	2:51:24 PM	BCl3 MFC set to  0.000000
11/14/2010	2:51:24 PM	PHl3 MFC set to  0.000000
11/14/2010	2:51:24 PM	SiCl4 MFC set to  0.000000
11/14/2010	2:51:24 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	2:51:24 PM	Tube furnace set to 750
11/14/2010	3:11:24 PM	H2 valve closed
11/14/2010	3:11:24 PM	BCl3 valve closed
11/14/2010	3:11:24 PM	PH3 valve closed
11/14/2010	3:11:24 PM	SiCl4 pre valve closed
11/14/2010	3:11:24 PM	SiCl4 post valve closed
11/14/2010	3:11:24 PM	Main Vac valve closed
11/14/2010	3:11:24 PM	Bypass valve closed
11/14/2010	3:11:24 PM	Helium valve opened
11/14/2010	3:11:24 PM	Bubbler valve opened
11/14/2010	3:11:24 PM	Helium MFC set to  500.000000
11/14/2010	3:11:24 PM	H2 MFC set to  0.000000
11/14/2010	3:11:24 PM	BCl3 MFC set to  0.000000
11/14/2010	3:11:24 PM	PHl3 MFC set to  0.000000
11/14/2010	3:11:24 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:11:24 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:11:24 PM	Tube furnace set to 0
11/14/2010	3:22:06 PM	Run aborted at 3:22 PM
11/14/2010	3:22:06 PM	Helium valve closed
11/14/2010	3:22:06 PM	H2 valve closed
11/14/2010	3:22:06 PM	BCl3 valve closed
11/14/2010	3:22:06 PM	PH3 valve closed
11/14/2010	3:22:06 PM	SiCl4 pre valve closed
11/14/2010	3:22:06 PM	SiCl4 post valve closed
11/14/2010	3:22:06 PM	Bypass valve closed
11/14/2010	3:22:06 PM	Main Vac valve closed
11/14/2010	3:22:06 PM	Bubbler valve closed
11/14/2010	3:22:06 PM	Helium MFC set to  0.000000
11/14/2010	3:22:06 PM	H2 MFC set to  0.000000
11/14/2010	3:22:06 PM	BCl3 MFC set to  0.000000
11/14/2010	3:22:06 PM	PHl3 MFC set to  0.000000
11/14/2010	3:22:07 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:22:07 PM	Tube furnace set to 0
11/14/2010	3:22:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	3:22:08 PM	Recipe started at 3:22 PM
11/14/2010	3:22:08 PM	H2 valve closed
11/14/2010	3:22:08 PM	BCl3 valve closed
11/14/2010	3:22:08 PM	PH3 valve closed
11/14/2010	3:22:08 PM	SiCl4 pre valve closed
11/14/2010	3:22:08 PM	SiCl4 post valve closed
11/14/2010	3:22:08 PM	Main Vac valve closed
11/14/2010	3:22:08 PM	Bypass valve closed
11/14/2010	3:22:08 PM	Bubbler valve closed
11/14/2010	3:22:08 PM	Helium valve opened
11/14/2010	3:22:08 PM	Helium MFC set to  500.000000
11/14/2010	3:22:08 PM	H2 MFC set to  0.000000
11/14/2010	3:22:08 PM	BCl3 MFC set to  0.000000
11/14/2010	3:22:08 PM	PHl3 MFC set to  0.000000
11/14/2010	3:22:08 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:22:08 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:22:08 PM	Tube furnace set to 0
11/14/2010	3:22:09 PM	Helium valve closed
11/14/2010	3:22:09 PM	H2 valve closed
11/14/2010	3:22:09 PM	BCl3 valve closed
11/14/2010	3:22:09 PM	PH3 valve closed
11/14/2010	3:22:09 PM	SiCl4 pre valve closed
11/14/2010	3:22:09 PM	SiCl4 post valve closed
11/14/2010	3:22:09 PM	Main Vac valve closed
11/14/2010	3:22:09 PM	Bypass valve closed
11/14/2010	3:22:09 PM	Bubbler valve closed
11/14/2010	3:22:09 PM	Helium MFC set to  0.000000
11/14/2010	3:22:09 PM	H2 MFC set to  0.000000
11/14/2010	3:22:09 PM	BCl3 MFC set to  0.000000
11/14/2010	3:22:09 PM	PHl3 MFC set to  0.000000
11/14/2010	3:22:09 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:22:09 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:22:09 PM	Tube furnace set to 0
11/14/2010	3:22:09 PM	Run finished at 3:22 PM
11/14/2010	3:22:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	3:25:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	3:25:33 PM	Recipe started at 3:25 PM
11/14/2010	3:25:33 PM	Helium valve closed
11/14/2010	3:25:33 PM	H2 valve closed
11/14/2010	3:25:33 PM	BCl3 valve closed
11/14/2010	3:25:33 PM	PH3 valve closed
11/14/2010	3:25:33 PM	SiCl4 pre valve closed
11/14/2010	3:25:33 PM	SiCl4 post valve closed
11/14/2010	3:25:33 PM	Main Vac valve closed
11/14/2010	3:25:33 PM	Bubbler valve closed
11/14/2010	3:25:33 PM	Bypass valve opened
11/14/2010	3:25:33 PM	Helium MFC set to  0.000000
11/14/2010	3:25:33 PM	H2 MFC set to  0.000000
11/14/2010	3:25:33 PM	BCl3 MFC set to  0.000000
11/14/2010	3:25:33 PM	PHl3 MFC set to  0.000000
11/14/2010	3:25:33 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:25:33 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:25:33 PM	Tube furnace set to 0
11/14/2010	3:26:23 PM	Helium valve closed
11/14/2010	3:26:23 PM	H2 valve closed
11/14/2010	3:26:23 PM	BCl3 valve closed
11/14/2010	3:26:23 PM	PH3 valve closed
11/14/2010	3:26:23 PM	SiCl4 pre valve closed
11/14/2010	3:26:23 PM	SiCl4 post valve closed
11/14/2010	3:26:23 PM	Bubbler valve closed
11/14/2010	3:26:23 PM	Main Vac valve opened
11/14/2010	3:26:23 PM	Bypass valve opened
11/14/2010	3:26:23 PM	Helium MFC set to  0.000000
11/14/2010	3:26:23 PM	H2 MFC set to  0.000000
11/14/2010	3:26:23 PM	BCl3 MFC set to  0.000000
11/14/2010	3:26:23 PM	PHl3 MFC set to  0.000000
11/14/2010	3:26:23 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:26:23 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:26:23 PM	Tube furnace set to 0
11/14/2010	3:26:23 PM	Run finished at 3:26 PM
11/14/2010	3:26:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	3:28:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	3:28:47 PM	Recipe started at 3:28 PM
11/14/2010	3:28:47 PM	H2 valve closed
11/14/2010	3:28:47 PM	BCl3 valve closed
11/14/2010	3:28:47 PM	PH3 valve closed
11/14/2010	3:28:47 PM	SiCl4 pre valve closed
11/14/2010	3:28:47 PM	SiCl4 post valve closed
11/14/2010	3:28:47 PM	Main Vac valve closed
11/14/2010	3:28:47 PM	Bypass valve closed
11/14/2010	3:28:47 PM	Bubbler valve closed
11/14/2010	3:28:47 PM	Helium valve opened
11/14/2010	3:28:47 PM	Helium MFC set to  500.000000
11/14/2010	3:28:47 PM	H2 MFC set to  0.000000
11/14/2010	3:28:47 PM	BCl3 MFC set to  0.000000
11/14/2010	3:28:47 PM	PHl3 MFC set to  0.000000
11/14/2010	3:28:47 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:28:47 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:28:47 PM	Tube furnace set to 0
11/14/2010	3:30:05 PM	Helium valve closed
11/14/2010	3:30:05 PM	H2 valve closed
11/14/2010	3:30:05 PM	BCl3 valve closed
11/14/2010	3:30:05 PM	PH3 valve closed
11/14/2010	3:30:05 PM	SiCl4 pre valve closed
11/14/2010	3:30:05 PM	SiCl4 post valve closed
11/14/2010	3:30:05 PM	Main Vac valve closed
11/14/2010	3:30:05 PM	Bypass valve closed
11/14/2010	3:30:05 PM	Bubbler valve closed
11/14/2010	3:30:05 PM	Helium MFC set to  0.000000
11/14/2010	3:30:05 PM	H2 MFC set to  0.000000
11/14/2010	3:30:05 PM	BCl3 MFC set to  0.000000
11/14/2010	3:30:05 PM	PHl3 MFC set to  0.000000
11/14/2010	3:30:05 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:30:05 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:30:05 PM	Tube furnace set to 0
11/14/2010	3:30:05 PM	Run finished at 3:30 PM
11/14/2010	3:30:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	3:32:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	3:32:49 PM	Recipe started at 3:32 PM
11/14/2010	3:32:49 PM	Helium valve closed
11/14/2010	3:32:49 PM	H2 valve closed
11/14/2010	3:32:49 PM	BCl3 valve closed
11/14/2010	3:32:49 PM	PH3 valve closed
11/14/2010	3:32:49 PM	SiCl4 pre valve closed
11/14/2010	3:32:49 PM	SiCl4 post valve closed
11/14/2010	3:32:49 PM	Main Vac valve closed
11/14/2010	3:32:49 PM	Bubbler valve closed
11/14/2010	3:32:49 PM	Bypass valve opened
11/14/2010	3:32:49 PM	Helium MFC set to  0.000000
11/14/2010	3:32:49 PM	H2 MFC set to  0.000000
11/14/2010	3:32:49 PM	BCl3 MFC set to  0.000000
11/14/2010	3:32:49 PM	PHl3 MFC set to  0.000000
11/14/2010	3:32:49 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:32:49 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:32:50 PM	Tube furnace set to 0
11/14/2010	3:33:25 PM	Helium valve closed
11/14/2010	3:33:25 PM	H2 valve closed
11/14/2010	3:33:25 PM	BCl3 valve closed
11/14/2010	3:33:25 PM	PH3 valve closed
11/14/2010	3:33:25 PM	SiCl4 pre valve closed
11/14/2010	3:33:25 PM	SiCl4 post valve closed
11/14/2010	3:33:25 PM	Bubbler valve closed
11/14/2010	3:33:25 PM	Main Vac valve opened
11/14/2010	3:33:25 PM	Bypass valve opened
11/14/2010	3:33:25 PM	Helium MFC set to  0.000000
11/14/2010	3:33:25 PM	H2 MFC set to  0.000000
11/14/2010	3:33:25 PM	BCl3 MFC set to  0.000000
11/14/2010	3:33:25 PM	PHl3 MFC set to  0.000000
11/14/2010	3:33:25 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:33:25 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:33:25 PM	Tube furnace set to 0
11/14/2010	3:33:26 PM	Run finished at 3:33 PM
11/14/2010	3:33:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	3:33:35 PM	Helium MFC set to  100.000000
11/14/2010	3:33:55 PM	Helium valve opened
11/14/2010	3:36:58 PM	Helium valve closed
11/14/2010	3:37:38 PM	Helium valve opened
11/14/2010	3:39:03 PM	Helium valve closed
11/14/2010	3:39:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/14/2010	3:39:52 PM	Recipe started at 3:39 PM
11/14/2010	3:39:52 PM	Helium valve closed
11/14/2010	3:39:52 PM	H2 valve closed
11/14/2010	3:39:52 PM	BCl3 valve closed
11/14/2010	3:39:52 PM	PH3 valve closed
11/14/2010	3:39:52 PM	SiCl4 pre valve closed
11/14/2010	3:39:52 PM	SiCl4 post valve closed
11/14/2010	3:39:52 PM	Main Vac valve closed
11/14/2010	3:39:52 PM	Bubbler valve closed
11/14/2010	3:39:52 PM	Bypass valve opened
11/14/2010	3:39:52 PM	Helium MFC set to  0.000000
11/14/2010	3:39:52 PM	H2 MFC set to  0.000000
11/14/2010	3:39:52 PM	BCl3 MFC set to  0.000000
11/14/2010	3:39:52 PM	PHl3 MFC set to  0.000000
11/14/2010	3:39:52 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:39:52 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:39:53 PM	Tube furnace set to 0
11/14/2010	3:39:53 PM	Helium valve closed
11/14/2010	3:39:53 PM	H2 valve closed
11/14/2010	3:39:53 PM	BCl3 valve closed
11/14/2010	3:39:53 PM	PH3 valve closed
11/14/2010	3:39:53 PM	SiCl4 pre valve closed
11/14/2010	3:39:53 PM	SiCl4 post valve closed
11/14/2010	3:39:53 PM	Bubbler valve closed
11/14/2010	3:39:53 PM	Main Vac valve opened
11/14/2010	3:39:53 PM	Bypass valve opened
11/14/2010	3:39:53 PM	Helium MFC set to  0.000000
11/14/2010	3:39:53 PM	H2 MFC set to  0.000000
11/14/2010	3:39:53 PM	BCl3 MFC set to  0.000000
11/14/2010	3:39:53 PM	PHl3 MFC set to  0.000000
11/14/2010	3:39:53 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:39:53 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:39:53 PM	Tube furnace set to 0
11/14/2010	3:40:53 PM	H2 valve closed
11/14/2010	3:40:53 PM	BCl3 valve closed
11/14/2010	3:40:53 PM	PH3 valve closed
11/14/2010	3:40:53 PM	SiCl4 pre valve closed
11/14/2010	3:40:53 PM	SiCl4 post valve closed
11/14/2010	3:40:53 PM	Bubbler valve closed
11/14/2010	3:40:53 PM	Helium valve opened
11/14/2010	3:40:53 PM	Main Vac valve opened
11/14/2010	3:40:53 PM	Bypass valve opened
11/14/2010	3:40:53 PM	Helium MFC set to  100.000000
11/14/2010	3:40:53 PM	H2 MFC set to  0.000000
11/14/2010	3:40:53 PM	BCl3 MFC set to  0.000000
11/14/2010	3:40:53 PM	PHl3 MFC set to  0.000000
11/14/2010	3:40:53 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:40:53 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:40:53 PM	Tube furnace set to 0
11/14/2010	3:41:53 PM	Helium valve closed
11/14/2010	3:41:53 PM	H2 valve closed
11/14/2010	3:41:53 PM	BCl3 valve closed
11/14/2010	3:41:53 PM	PH3 valve closed
11/14/2010	3:41:53 PM	SiCl4 pre valve closed
11/14/2010	3:41:53 PM	SiCl4 post valve closed
11/14/2010	3:41:53 PM	Bubbler valve closed
11/14/2010	3:41:53 PM	Main Vac valve opened
11/14/2010	3:41:53 PM	Bypass valve opened
11/14/2010	3:41:53 PM	Helium MFC set to  0.000000
11/14/2010	3:41:53 PM	H2 MFC set to  0.000000
11/14/2010	3:41:53 PM	BCl3 MFC set to  0.000000
11/14/2010	3:41:53 PM	PHl3 MFC set to  0.000000
11/14/2010	3:41:53 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:41:53 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:41:53 PM	Tube furnace set to 0
11/14/2010	3:42:53 PM	H2 valve closed
11/14/2010	3:42:53 PM	BCl3 valve closed
11/14/2010	3:42:53 PM	PH3 valve closed
11/14/2010	3:42:53 PM	SiCl4 pre valve closed
11/14/2010	3:42:53 PM	SiCl4 post valve closed
11/14/2010	3:42:53 PM	Bubbler valve closed
11/14/2010	3:42:53 PM	Helium valve opened
11/14/2010	3:42:53 PM	Main Vac valve opened
11/14/2010	3:42:53 PM	Bypass valve opened
11/14/2010	3:42:53 PM	Helium MFC set to  100.000000
11/14/2010	3:42:53 PM	H2 MFC set to  0.000000
11/14/2010	3:42:53 PM	BCl3 MFC set to  0.000000
11/14/2010	3:42:53 PM	PHl3 MFC set to  0.000000
11/14/2010	3:42:53 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:42:53 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:42:54 PM	Tube furnace set to 0
11/14/2010	3:43:54 PM	Helium valve closed
11/14/2010	3:43:54 PM	H2 valve closed
11/14/2010	3:43:54 PM	BCl3 valve closed
11/14/2010	3:43:54 PM	PH3 valve closed
11/14/2010	3:43:54 PM	SiCl4 pre valve closed
11/14/2010	3:43:54 PM	SiCl4 post valve closed
11/14/2010	3:43:54 PM	Bubbler valve closed
11/14/2010	3:43:54 PM	Main Vac valve opened
11/14/2010	3:43:54 PM	Bypass valve opened
11/14/2010	3:43:54 PM	Helium MFC set to  0.000000
11/14/2010	3:43:54 PM	H2 MFC set to  0.000000
11/14/2010	3:43:54 PM	BCl3 MFC set to  0.000000
11/14/2010	3:43:54 PM	PHl3 MFC set to  0.000000
11/14/2010	3:43:54 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:43:54 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:43:54 PM	Tube furnace set to 0
11/14/2010	3:44:54 PM	H2 valve closed
11/14/2010	3:44:54 PM	BCl3 valve closed
11/14/2010	3:44:54 PM	PH3 valve closed
11/14/2010	3:44:54 PM	SiCl4 pre valve closed
11/14/2010	3:44:54 PM	SiCl4 post valve closed
11/14/2010	3:44:54 PM	Bubbler valve closed
11/14/2010	3:44:54 PM	Helium valve opened
11/14/2010	3:44:54 PM	Main Vac valve opened
11/14/2010	3:44:54 PM	Bypass valve opened
11/14/2010	3:44:54 PM	Helium MFC set to  100.000000
11/14/2010	3:44:54 PM	H2 MFC set to  0.000000
11/14/2010	3:44:54 PM	BCl3 MFC set to  0.000000
11/14/2010	3:44:54 PM	PHl3 MFC set to  0.000000
11/14/2010	3:44:54 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:44:54 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:44:54 PM	Tube furnace set to 0
11/14/2010	3:45:54 PM	Helium valve closed
11/14/2010	3:45:54 PM	H2 valve closed
11/14/2010	3:45:54 PM	BCl3 valve closed
11/14/2010	3:45:54 PM	PH3 valve closed
11/14/2010	3:45:54 PM	SiCl4 pre valve closed
11/14/2010	3:45:54 PM	SiCl4 post valve closed
11/14/2010	3:45:54 PM	Bubbler valve closed
11/14/2010	3:45:54 PM	Main Vac valve opened
11/14/2010	3:45:54 PM	Bypass valve opened
11/14/2010	3:45:54 PM	Helium MFC set to  0.000000
11/14/2010	3:45:54 PM	H2 MFC set to  0.000000
11/14/2010	3:45:54 PM	BCl3 MFC set to  0.000000
11/14/2010	3:45:54 PM	PHl3 MFC set to  0.000000
11/14/2010	3:45:54 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:45:54 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:45:54 PM	Tube furnace set to 0
11/14/2010	3:46:54 PM	H2 valve closed
11/14/2010	3:46:54 PM	BCl3 valve closed
11/14/2010	3:46:54 PM	PH3 valve closed
11/14/2010	3:46:54 PM	SiCl4 pre valve closed
11/14/2010	3:46:54 PM	SiCl4 post valve closed
11/14/2010	3:46:54 PM	Bubbler valve closed
11/14/2010	3:46:54 PM	Helium valve opened
11/14/2010	3:46:54 PM	Main Vac valve opened
11/14/2010	3:46:54 PM	Bypass valve opened
11/14/2010	3:46:54 PM	Helium MFC set to  100.000000
11/14/2010	3:46:54 PM	H2 MFC set to  0.000000
11/14/2010	3:46:54 PM	BCl3 MFC set to  0.000000
11/14/2010	3:46:54 PM	PHl3 MFC set to  0.000000
11/14/2010	3:46:54 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:46:54 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:46:54 PM	Tube furnace set to 0
11/14/2010	3:47:54 PM	Helium valve closed
11/14/2010	3:47:54 PM	H2 valve closed
11/14/2010	3:47:54 PM	BCl3 valve closed
11/14/2010	3:47:54 PM	PH3 valve closed
11/14/2010	3:47:54 PM	SiCl4 pre valve closed
11/14/2010	3:47:54 PM	SiCl4 post valve closed
11/14/2010	3:47:54 PM	Bubbler valve closed
11/14/2010	3:47:54 PM	Main Vac valve opened
11/14/2010	3:47:54 PM	Bypass valve opened
11/14/2010	3:47:54 PM	Helium MFC set to  0.000000
11/14/2010	3:47:54 PM	H2 MFC set to  0.000000
11/14/2010	3:47:54 PM	BCl3 MFC set to  0.000000
11/14/2010	3:47:54 PM	PHl3 MFC set to  0.000000
11/14/2010	3:47:54 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:47:54 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:47:55 PM	Tube furnace set to 0
11/14/2010	3:48:55 PM	H2 valve closed
11/14/2010	3:48:55 PM	BCl3 valve closed
11/14/2010	3:48:55 PM	PH3 valve closed
11/14/2010	3:48:55 PM	SiCl4 pre valve closed
11/14/2010	3:48:55 PM	SiCl4 post valve closed
11/14/2010	3:48:55 PM	Bubbler valve closed
11/14/2010	3:48:55 PM	Helium valve opened
11/14/2010	3:48:55 PM	Main Vac valve opened
11/14/2010	3:48:55 PM	Bypass valve opened
11/14/2010	3:48:55 PM	Helium MFC set to  100.000000
11/14/2010	3:48:55 PM	H2 MFC set to  0.000000
11/14/2010	3:48:55 PM	BCl3 MFC set to  0.000000
11/14/2010	3:48:55 PM	PHl3 MFC set to  0.000000
11/14/2010	3:48:55 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:48:55 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:48:55 PM	Tube furnace set to 0
11/14/2010	3:49:55 PM	Helium valve closed
11/14/2010	3:49:55 PM	H2 valve closed
11/14/2010	3:49:55 PM	BCl3 valve closed
11/14/2010	3:49:55 PM	PH3 valve closed
11/14/2010	3:49:55 PM	SiCl4 pre valve closed
11/14/2010	3:49:55 PM	SiCl4 post valve closed
11/14/2010	3:49:55 PM	Bubbler valve closed
11/14/2010	3:49:55 PM	Main Vac valve opened
11/14/2010	3:49:55 PM	Bypass valve opened
11/14/2010	3:49:55 PM	Helium MFC set to  0.000000
11/14/2010	3:49:55 PM	H2 MFC set to  0.000000
11/14/2010	3:49:55 PM	BCl3 MFC set to  0.000000
11/14/2010	3:49:55 PM	PHl3 MFC set to  0.000000
11/14/2010	3:49:55 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:49:55 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:49:55 PM	Tube furnace set to 0
11/14/2010	3:50:55 PM	H2 valve closed
11/14/2010	3:50:55 PM	BCl3 valve closed
11/14/2010	3:50:55 PM	PH3 valve closed
11/14/2010	3:50:55 PM	SiCl4 pre valve closed
11/14/2010	3:50:55 PM	SiCl4 post valve closed
11/14/2010	3:50:55 PM	Bubbler valve closed
11/14/2010	3:50:55 PM	Helium valve opened
11/14/2010	3:50:55 PM	Main Vac valve opened
11/14/2010	3:50:55 PM	Bypass valve opened
11/14/2010	3:50:55 PM	Helium MFC set to  100.000000
11/14/2010	3:50:55 PM	H2 MFC set to  0.000000
11/14/2010	3:50:55 PM	BCl3 MFC set to  0.000000
11/14/2010	3:50:55 PM	PHl3 MFC set to  0.000000
11/14/2010	3:50:55 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:50:55 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:50:55 PM	Tube furnace set to 0
11/14/2010	3:51:55 PM	Helium valve closed
11/14/2010	3:51:55 PM	H2 valve closed
11/14/2010	3:51:55 PM	BCl3 valve closed
11/14/2010	3:51:55 PM	PH3 valve closed
11/14/2010	3:51:55 PM	SiCl4 pre valve closed
11/14/2010	3:51:55 PM	SiCl4 post valve closed
11/14/2010	3:51:55 PM	Bubbler valve closed
11/14/2010	3:51:55 PM	Main Vac valve opened
11/14/2010	3:51:55 PM	Bypass valve opened
11/14/2010	3:51:55 PM	Helium MFC set to  0.000000
11/14/2010	3:51:55 PM	H2 MFC set to  0.000000
11/14/2010	3:51:55 PM	BCl3 MFC set to  0.000000
11/14/2010	3:51:55 PM	PHl3 MFC set to  0.000000
11/14/2010	3:51:55 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:51:55 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:51:55 PM	Tube furnace set to 0
11/14/2010	3:52:55 PM	H2 valve closed
11/14/2010	3:52:55 PM	BCl3 valve closed
11/14/2010	3:52:55 PM	PH3 valve closed
11/14/2010	3:52:55 PM	SiCl4 pre valve closed
11/14/2010	3:52:55 PM	SiCl4 post valve closed
11/14/2010	3:52:55 PM	Bubbler valve closed
11/14/2010	3:52:55 PM	Helium valve opened
11/14/2010	3:52:55 PM	Main Vac valve opened
11/14/2010	3:52:55 PM	Bypass valve opened
11/14/2010	3:52:55 PM	Helium MFC set to  100.000000
11/14/2010	3:52:55 PM	H2 MFC set to  0.000000
11/14/2010	3:52:55 PM	BCl3 MFC set to  0.000000
11/14/2010	3:52:55 PM	PHl3 MFC set to  0.000000
11/14/2010	3:52:55 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:52:55 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:52:56 PM	Tube furnace set to 0
11/14/2010	3:53:56 PM	Helium valve closed
11/14/2010	3:53:56 PM	H2 valve closed
11/14/2010	3:53:56 PM	BCl3 valve closed
11/14/2010	3:53:56 PM	PH3 valve closed
11/14/2010	3:53:56 PM	SiCl4 pre valve closed
11/14/2010	3:53:56 PM	SiCl4 post valve closed
11/14/2010	3:53:56 PM	Bubbler valve closed
11/14/2010	3:53:56 PM	Main Vac valve opened
11/14/2010	3:53:56 PM	Bypass valve opened
11/14/2010	3:53:56 PM	Helium MFC set to  0.000000
11/14/2010	3:53:56 PM	H2 MFC set to  0.000000
11/14/2010	3:53:56 PM	BCl3 MFC set to  0.000000
11/14/2010	3:53:56 PM	PHl3 MFC set to  0.000000
11/14/2010	3:53:56 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:53:56 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:53:56 PM	Tube furnace set to 0
11/14/2010	3:54:56 PM	H2 valve closed
11/14/2010	3:54:56 PM	BCl3 valve closed
11/14/2010	3:54:56 PM	PH3 valve closed
11/14/2010	3:54:56 PM	SiCl4 pre valve closed
11/14/2010	3:54:56 PM	SiCl4 post valve closed
11/14/2010	3:54:56 PM	Bubbler valve closed
11/14/2010	3:54:56 PM	Helium valve opened
11/14/2010	3:54:56 PM	Main Vac valve opened
11/14/2010	3:54:56 PM	Bypass valve opened
11/14/2010	3:54:56 PM	Helium MFC set to  100.000000
11/14/2010	3:54:56 PM	H2 MFC set to  0.000000
11/14/2010	3:54:56 PM	BCl3 MFC set to  0.000000
11/14/2010	3:54:56 PM	PHl3 MFC set to  0.000000
11/14/2010	3:54:56 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:54:56 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:54:56 PM	Tube furnace set to 0
11/14/2010	3:55:56 PM	Helium valve closed
11/14/2010	3:55:56 PM	H2 valve closed
11/14/2010	3:55:56 PM	BCl3 valve closed
11/14/2010	3:55:56 PM	PH3 valve closed
11/14/2010	3:55:56 PM	SiCl4 pre valve closed
11/14/2010	3:55:56 PM	SiCl4 post valve closed
11/14/2010	3:55:56 PM	Bubbler valve closed
11/14/2010	3:55:56 PM	Main Vac valve opened
11/14/2010	3:55:56 PM	Bypass valve opened
11/14/2010	3:55:56 PM	Helium MFC set to  0.000000
11/14/2010	3:55:56 PM	H2 MFC set to  0.000000
11/14/2010	3:55:56 PM	BCl3 MFC set to  0.000000
11/14/2010	3:55:56 PM	PHl3 MFC set to  0.000000
11/14/2010	3:55:56 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:55:56 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:55:56 PM	Tube furnace set to 0
11/14/2010	3:56:56 PM	H2 valve closed
11/14/2010	3:56:56 PM	BCl3 valve closed
11/14/2010	3:56:56 PM	PH3 valve closed
11/14/2010	3:56:56 PM	SiCl4 pre valve closed
11/14/2010	3:56:56 PM	SiCl4 post valve closed
11/14/2010	3:56:56 PM	Bubbler valve closed
11/14/2010	3:56:56 PM	Helium valve opened
11/14/2010	3:56:56 PM	Main Vac valve opened
11/14/2010	3:56:56 PM	Bypass valve opened
11/14/2010	3:56:56 PM	Helium MFC set to  100.000000
11/14/2010	3:56:56 PM	H2 MFC set to  0.000000
11/14/2010	3:56:56 PM	BCl3 MFC set to  0.000000
11/14/2010	3:56:56 PM	PHl3 MFC set to  0.000000
11/14/2010	3:56:56 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:56:56 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:56:56 PM	Tube furnace set to 0
11/14/2010	3:57:56 PM	Helium valve closed
11/14/2010	3:57:56 PM	H2 valve closed
11/14/2010	3:57:56 PM	BCl3 valve closed
11/14/2010	3:57:56 PM	PH3 valve closed
11/14/2010	3:57:56 PM	SiCl4 pre valve closed
11/14/2010	3:57:56 PM	SiCl4 post valve closed
11/14/2010	3:57:56 PM	Bubbler valve closed
11/14/2010	3:57:56 PM	Main Vac valve opened
11/14/2010	3:57:56 PM	Bypass valve opened
11/14/2010	3:57:56 PM	Helium MFC set to  0.000000
11/14/2010	3:57:56 PM	H2 MFC set to  0.000000
11/14/2010	3:57:56 PM	BCl3 MFC set to  0.000000
11/14/2010	3:57:56 PM	PHl3 MFC set to  0.000000
11/14/2010	3:57:56 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:57:56 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:57:57 PM	Tube furnace set to 0
11/14/2010	3:58:57 PM	H2 valve closed
11/14/2010	3:58:57 PM	BCl3 valve closed
11/14/2010	3:58:57 PM	PH3 valve closed
11/14/2010	3:58:57 PM	SiCl4 pre valve closed
11/14/2010	3:58:57 PM	SiCl4 post valve closed
11/14/2010	3:58:57 PM	Bubbler valve closed
11/14/2010	3:58:57 PM	Helium valve opened
11/14/2010	3:58:57 PM	Main Vac valve opened
11/14/2010	3:58:57 PM	Bypass valve opened
11/14/2010	3:58:57 PM	Helium MFC set to  100.000000
11/14/2010	3:58:57 PM	H2 MFC set to  0.000000
11/14/2010	3:58:57 PM	BCl3 MFC set to  0.000000
11/14/2010	3:58:57 PM	PHl3 MFC set to  0.000000
11/14/2010	3:58:57 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:58:57 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:58:57 PM	Tube furnace set to 0
11/14/2010	3:59:57 PM	Helium valve closed
11/14/2010	3:59:57 PM	H2 valve closed
11/14/2010	3:59:57 PM	BCl3 valve closed
11/14/2010	3:59:57 PM	PH3 valve closed
11/14/2010	3:59:57 PM	SiCl4 pre valve closed
11/14/2010	3:59:57 PM	SiCl4 post valve closed
11/14/2010	3:59:57 PM	Bubbler valve closed
11/14/2010	3:59:57 PM	Main Vac valve opened
11/14/2010	3:59:57 PM	Bypass valve opened
11/14/2010	3:59:57 PM	Helium MFC set to  0.000000
11/14/2010	3:59:57 PM	H2 MFC set to  0.000000
11/14/2010	3:59:57 PM	BCl3 MFC set to  0.000000
11/14/2010	3:59:57 PM	PHl3 MFC set to  0.000000
11/14/2010	3:59:57 PM	SiCl4 MFC set to  0.000000
11/14/2010	3:59:57 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	3:59:57 PM	Tube furnace set to 0
11/14/2010	3:59:58 PM	Run finished at 3:59 PM
11/14/2010	3:59:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/14/2010	4:10:37 PM	Helium MFC set to  100.000000
11/14/2010	4:10:38 PM	Helium valve opened
11/14/2010	4:21:01 PM	Helium MFC set to  100.000000
11/14/2010	4:21:01 PM	Helium valve closed
11/14/2010	4:21:04 PM	Helium MFC set to  0.000000
11/14/2010	4:21:51 PM	Recipe started at 4:21 PM
11/14/2010	4:21:51 PM	Helium valve closed
11/14/2010	4:21:51 PM	BCl3 valve closed
11/14/2010	4:21:51 PM	PH3 valve closed
11/14/2010	4:21:51 PM	SiCl4 pre valve closed
11/14/2010	4:21:51 PM	SiCl4 post valve closed
11/14/2010	4:21:51 PM	Main Vac valve closed
11/14/2010	4:21:51 PM	Bypass valve closed
11/14/2010	4:21:51 PM	Bubbler valve closed
11/14/2010	4:21:51 PM	H2 valve opened
11/14/2010	4:21:51 PM	Helium MFC set to  0.000000
11/14/2010	4:21:51 PM	H2 MFC set to  500.000000
11/14/2010	4:21:51 PM	BCl3 MFC set to  0.000000
11/14/2010	4:21:51 PM	PHl3 MFC set to  0.000000
11/14/2010	4:21:51 PM	SiCl4 MFC set to  0.000000
11/14/2010	4:21:51 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	4:21:51 PM	Tube furnace set to 1000
11/14/2010	4:23:12 PM	Helium valve closed
11/14/2010	4:23:12 PM	BCl3 valve closed
11/14/2010	4:23:12 PM	PH3 valve closed
11/14/2010	4:23:12 PM	SiCl4 pre valve closed
11/14/2010	4:23:12 PM	SiCl4 post valve closed
11/14/2010	4:23:12 PM	Main Vac valve closed
11/14/2010	4:23:12 PM	Bypass valve closed
11/14/2010	4:23:12 PM	H2 valve opened
11/14/2010	4:23:12 PM	Bubbler valve opened
11/14/2010	4:23:12 PM	Helium MFC set to  0.000000
11/14/2010	4:23:12 PM	H2 MFC set to  500.000000
11/14/2010	4:23:12 PM	BCl3 MFC set to  0.000000
11/14/2010	4:23:12 PM	PHl3 MFC set to  0.000000
11/14/2010	4:23:12 PM	SiCl4 MFC set to  0.000000
11/14/2010	4:23:12 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	4:23:12 PM	Tube furnace set to 1000
11/14/2010	4:43:12 PM	Helium valve closed
11/14/2010	4:43:12 PM	PH3 valve closed
11/14/2010	4:43:12 PM	Main Vac valve closed
11/14/2010	4:43:12 PM	Bypass valve closed
11/14/2010	4:43:12 PM	H2 valve opened
11/14/2010	4:43:12 PM	BCl3 valve opened
11/14/2010	4:43:12 PM	SiCl4 pre valve opened
11/14/2010	4:43:12 PM	SiCl4 post valve opened
11/14/2010	4:43:12 PM	Bubbler valve opened
11/14/2010	4:43:12 PM	Helium MFC set to  0.000000
11/14/2010	4:43:12 PM	H2 MFC set to  500.000000
11/14/2010	4:43:12 PM	BCl3 MFC set to  12.000000
11/14/2010	4:43:12 PM	PHl3 MFC set to  0.000000
11/14/2010	4:43:12 PM	SiCl4 MFC set to  50.000000
11/14/2010	4:43:12 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	4:43:12 PM	Tube furnace set to 1000
11/14/2010	5:03:12 PM	Helium valve closed
11/14/2010	5:03:12 PM	BCl3 valve closed
11/14/2010	5:03:12 PM	PH3 valve closed
11/14/2010	5:03:12 PM	SiCl4 pre valve closed
11/14/2010	5:03:12 PM	SiCl4 post valve closed
11/14/2010	5:03:12 PM	Main Vac valve closed
11/14/2010	5:03:12 PM	Bypass valve closed
11/14/2010	5:03:12 PM	H2 valve opened
11/14/2010	5:03:12 PM	Bubbler valve opened
11/14/2010	5:03:12 PM	Helium MFC set to  0.000000
11/14/2010	5:03:12 PM	H2 MFC set to  500.000000
11/14/2010	5:03:12 PM	BCl3 MFC set to  0.000000
11/14/2010	5:03:12 PM	PHl3 MFC set to  0.000000
11/14/2010	5:03:12 PM	SiCl4 MFC set to  0.000000
11/14/2010	5:03:12 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	5:03:13 PM	Tube furnace set to 750
11/14/2010	5:23:13 PM	H2 valve closed
11/14/2010	5:23:13 PM	BCl3 valve closed
11/14/2010	5:23:13 PM	PH3 valve closed
11/14/2010	5:23:13 PM	SiCl4 pre valve closed
11/14/2010	5:23:13 PM	SiCl4 post valve closed
11/14/2010	5:23:13 PM	Main Vac valve closed
11/14/2010	5:23:13 PM	Bypass valve closed
11/14/2010	5:23:13 PM	Helium valve opened
11/14/2010	5:23:13 PM	Bubbler valve opened
11/14/2010	5:23:13 PM	Helium MFC set to  500.000000
11/14/2010	5:23:13 PM	H2 MFC set to  0.000000
11/14/2010	5:23:13 PM	BCl3 MFC set to  0.000000
11/14/2010	5:23:13 PM	PHl3 MFC set to  0.000000
11/14/2010	5:23:13 PM	SiCl4 MFC set to  0.000000
11/14/2010	5:23:13 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	5:23:13 PM	Tube furnace set to 0
11/14/2010	5:31:26 PM	Run aborted at 5:31 PM
11/14/2010	5:31:26 PM	Helium valve closed
11/14/2010	5:31:26 PM	H2 valve closed
11/14/2010	5:31:26 PM	BCl3 valve closed
11/14/2010	5:31:26 PM	PH3 valve closed
11/14/2010	5:31:26 PM	SiCl4 pre valve closed
11/14/2010	5:31:26 PM	SiCl4 post valve closed
11/14/2010	5:31:26 PM	Bypass valve closed
11/14/2010	5:31:26 PM	Main Vac valve closed
11/14/2010	5:31:26 PM	Bubbler valve closed
11/14/2010	5:31:26 PM	Helium MFC set to  0.000000
11/14/2010	5:31:26 PM	H2 MFC set to  0.000000
11/14/2010	5:31:26 PM	BCl3 MFC set to  0.000000
11/14/2010	5:31:26 PM	PHl3 MFC set to  0.000000
11/14/2010	5:31:26 PM	SiCl4 MFC set to  0.000000
11/14/2010	5:31:26 PM	Tube furnace set to 0
11/14/2010	5:31:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	5:31:30 PM	Recipe started at 5:31 PM
11/14/2010	5:31:30 PM	H2 valve closed
11/14/2010	5:31:30 PM	BCl3 valve closed
11/14/2010	5:31:30 PM	PH3 valve closed
11/14/2010	5:31:30 PM	SiCl4 pre valve closed
11/14/2010	5:31:30 PM	SiCl4 post valve closed
11/14/2010	5:31:30 PM	Main Vac valve closed
11/14/2010	5:31:30 PM	Bypass valve closed
11/14/2010	5:31:30 PM	Bubbler valve closed
11/14/2010	5:31:30 PM	Helium valve opened
11/14/2010	5:31:30 PM	Helium MFC set to  500.000000
11/14/2010	5:31:30 PM	H2 MFC set to  0.000000
11/14/2010	5:31:30 PM	BCl3 MFC set to  0.000000
11/14/2010	5:31:30 PM	PHl3 MFC set to  0.000000
11/14/2010	5:31:30 PM	SiCl4 MFC set to  0.000000
11/14/2010	5:31:30 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	5:31:30 PM	Tube furnace set to 0
11/14/2010	5:31:30 PM	Helium valve closed
11/14/2010	5:31:30 PM	H2 valve closed
11/14/2010	5:31:30 PM	BCl3 valve closed
11/14/2010	5:31:30 PM	PH3 valve closed
11/14/2010	5:31:30 PM	SiCl4 pre valve closed
11/14/2010	5:31:30 PM	SiCl4 post valve closed
11/14/2010	5:31:30 PM	Main Vac valve closed
11/14/2010	5:31:30 PM	Bypass valve closed
11/14/2010	5:31:30 PM	Bubbler valve closed
11/14/2010	5:31:30 PM	Helium MFC set to  0.000000
11/14/2010	5:31:30 PM	H2 MFC set to  0.000000
11/14/2010	5:31:30 PM	BCl3 MFC set to  0.000000
11/14/2010	5:31:30 PM	PHl3 MFC set to  0.000000
11/14/2010	5:31:30 PM	SiCl4 MFC set to  0.000000
11/14/2010	5:31:30 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	5:31:30 PM	Tube furnace set to 0
11/14/2010	5:31:31 PM	Run finished at 5:31 PM
11/14/2010	5:31:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	5:53:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	5:53:50 PM	Recipe started at 5:53 PM
11/14/2010	5:53:50 PM	Helium valve closed
11/14/2010	5:53:50 PM	H2 valve closed
11/14/2010	5:53:50 PM	BCl3 valve closed
11/14/2010	5:53:50 PM	PH3 valve closed
11/14/2010	5:53:50 PM	SiCl4 pre valve closed
11/14/2010	5:53:50 PM	SiCl4 post valve closed
11/14/2010	5:53:50 PM	Main Vac valve closed
11/14/2010	5:53:50 PM	Bubbler valve closed
11/14/2010	5:53:50 PM	Bypass valve opened
11/14/2010	5:53:50 PM	Helium MFC set to  0.000000
11/14/2010	5:53:50 PM	H2 MFC set to  0.000000
11/14/2010	5:53:50 PM	BCl3 MFC set to  0.000000
11/14/2010	5:53:50 PM	PHl3 MFC set to  0.000000
11/14/2010	5:53:50 PM	SiCl4 MFC set to  0.000000
11/14/2010	5:53:50 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	5:53:50 PM	Tube furnace set to 0
11/14/2010	5:54:44 PM	Helium valve closed
11/14/2010	5:54:44 PM	H2 valve closed
11/14/2010	5:54:44 PM	BCl3 valve closed
11/14/2010	5:54:44 PM	PH3 valve closed
11/14/2010	5:54:44 PM	SiCl4 pre valve closed
11/14/2010	5:54:44 PM	SiCl4 post valve closed
11/14/2010	5:54:44 PM	Bubbler valve closed
11/14/2010	5:54:44 PM	Main Vac valve opened
11/14/2010	5:54:44 PM	Bypass valve opened
11/14/2010	5:54:44 PM	Helium MFC set to  0.000000
11/14/2010	5:54:44 PM	H2 MFC set to  0.000000
11/14/2010	5:54:44 PM	BCl3 MFC set to  0.000000
11/14/2010	5:54:44 PM	PHl3 MFC set to  0.000000
11/14/2010	5:54:44 PM	SiCl4 MFC set to  0.000000
11/14/2010	5:54:44 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	5:54:44 PM	Tube furnace set to 0
11/14/2010	5:54:44 PM	Run finished at 5:54 PM
11/14/2010	5:54:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	5:54:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	5:54:57 PM	Recipe started at 5:54 PM
11/14/2010	5:54:57 PM	H2 valve closed
11/14/2010	5:54:57 PM	BCl3 valve closed
11/14/2010	5:54:57 PM	PH3 valve closed
11/14/2010	5:54:57 PM	SiCl4 pre valve closed
11/14/2010	5:54:57 PM	SiCl4 post valve closed
11/14/2010	5:54:57 PM	Main Vac valve closed
11/14/2010	5:54:57 PM	Bypass valve closed
11/14/2010	5:54:57 PM	Bubbler valve closed
11/14/2010	5:54:57 PM	Helium valve opened
11/14/2010	5:54:57 PM	Helium MFC set to  500.000000
11/14/2010	5:54:57 PM	H2 MFC set to  0.000000
11/14/2010	5:54:57 PM	BCl3 MFC set to  0.000000
11/14/2010	5:54:57 PM	PHl3 MFC set to  0.000000
11/14/2010	5:54:57 PM	SiCl4 MFC set to  0.000000
11/14/2010	5:54:57 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	5:54:58 PM	Tube furnace set to 0
11/14/2010	5:56:17 PM	Helium valve closed
11/14/2010	5:56:17 PM	H2 valve closed
11/14/2010	5:56:17 PM	BCl3 valve closed
11/14/2010	5:56:17 PM	PH3 valve closed
11/14/2010	5:56:17 PM	SiCl4 pre valve closed
11/14/2010	5:56:17 PM	SiCl4 post valve closed
11/14/2010	5:56:17 PM	Main Vac valve closed
11/14/2010	5:56:17 PM	Bypass valve closed
11/14/2010	5:56:17 PM	Bubbler valve closed
11/14/2010	5:56:17 PM	Helium MFC set to  0.000000
11/14/2010	5:56:17 PM	H2 MFC set to  0.000000
11/14/2010	5:56:17 PM	BCl3 MFC set to  0.000000
11/14/2010	5:56:17 PM	PHl3 MFC set to  0.000000
11/14/2010	5:56:17 PM	SiCl4 MFC set to  0.000000
11/14/2010	5:56:17 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	5:56:17 PM	Tube furnace set to 0
11/14/2010	5:56:17 PM	Run finished at 5:56 PM
11/14/2010	5:56:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	5:56:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	5:56:29 PM	Recipe started at 5:56 PM
11/14/2010	5:56:29 PM	Helium valve closed
11/14/2010	5:56:29 PM	H2 valve closed
11/14/2010	5:56:29 PM	BCl3 valve closed
11/14/2010	5:56:29 PM	PH3 valve closed
11/14/2010	5:56:29 PM	SiCl4 pre valve closed
11/14/2010	5:56:29 PM	SiCl4 post valve closed
11/14/2010	5:56:29 PM	Main Vac valve closed
11/14/2010	5:56:29 PM	Bubbler valve closed
11/14/2010	5:56:29 PM	Bypass valve opened
11/14/2010	5:56:29 PM	Helium MFC set to  0.000000
11/14/2010	5:56:29 PM	H2 MFC set to  0.000000
11/14/2010	5:56:29 PM	BCl3 MFC set to  0.000000
11/14/2010	5:56:29 PM	PHl3 MFC set to  0.000000
11/14/2010	5:56:29 PM	SiCl4 MFC set to  0.000000
11/14/2010	5:56:29 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	5:56:29 PM	Tube furnace set to 0
11/14/2010	5:57:06 PM	Helium valve closed
11/14/2010	5:57:06 PM	H2 valve closed
11/14/2010	5:57:06 PM	BCl3 valve closed
11/14/2010	5:57:06 PM	PH3 valve closed
11/14/2010	5:57:06 PM	SiCl4 pre valve closed
11/14/2010	5:57:06 PM	SiCl4 post valve closed
11/14/2010	5:57:06 PM	Bubbler valve closed
11/14/2010	5:57:06 PM	Main Vac valve opened
11/14/2010	5:57:06 PM	Bypass valve opened
11/14/2010	5:57:06 PM	Helium MFC set to  0.000000
11/14/2010	5:57:06 PM	H2 MFC set to  0.000000
11/14/2010	5:57:06 PM	BCl3 MFC set to  0.000000
11/14/2010	5:57:06 PM	PHl3 MFC set to  0.000000
11/14/2010	5:57:06 PM	SiCl4 MFC set to  0.000000
11/14/2010	5:57:06 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	5:57:06 PM	Tube furnace set to 0
11/14/2010	5:57:06 PM	Run finished at 5:57 PM
11/14/2010	5:57:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	5:58:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	5:58:40 PM	Recipe started at 5:58 PM
11/14/2010	5:58:40 PM	H2 valve closed
11/14/2010	5:58:40 PM	BCl3 valve closed
11/14/2010	5:58:40 PM	PH3 valve closed
11/14/2010	5:58:40 PM	SiCl4 pre valve closed
11/14/2010	5:58:40 PM	SiCl4 post valve closed
11/14/2010	5:58:40 PM	Main Vac valve closed
11/14/2010	5:58:40 PM	Bypass valve closed
11/14/2010	5:58:40 PM	Bubbler valve closed
11/14/2010	5:58:40 PM	Helium valve opened
11/14/2010	5:58:40 PM	Helium MFC set to  500.000000
11/14/2010	5:58:40 PM	H2 MFC set to  0.000000
11/14/2010	5:58:40 PM	BCl3 MFC set to  0.000000
11/14/2010	5:58:40 PM	PHl3 MFC set to  0.000000
11/14/2010	5:58:40 PM	SiCl4 MFC set to  0.000000
11/14/2010	5:58:40 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	5:58:40 PM	Tube furnace set to 0
11/14/2010	5:59:59 PM	Helium valve closed
11/14/2010	5:59:59 PM	H2 valve closed
11/14/2010	5:59:59 PM	BCl3 valve closed
11/14/2010	5:59:59 PM	PH3 valve closed
11/14/2010	5:59:59 PM	SiCl4 pre valve closed
11/14/2010	5:59:59 PM	SiCl4 post valve closed
11/14/2010	5:59:59 PM	Main Vac valve closed
11/14/2010	5:59:59 PM	Bypass valve closed
11/14/2010	5:59:59 PM	Bubbler valve closed
11/14/2010	5:59:59 PM	Helium MFC set to  0.000000
11/14/2010	5:59:59 PM	H2 MFC set to  0.000000
11/14/2010	5:59:59 PM	BCl3 MFC set to  0.000000
11/14/2010	5:59:59 PM	PHl3 MFC set to  0.000000
11/14/2010	5:59:59 PM	SiCl4 MFC set to  0.000000
11/14/2010	5:59:59 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:00:00 PM	Tube furnace set to 0
11/14/2010	6:00:00 PM	Run finished at 6:00 PM
11/14/2010	6:00:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	6:00:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	6:00:03 PM	Recipe started at 6:00 PM
11/14/2010	6:00:03 PM	Helium valve closed
11/14/2010	6:00:03 PM	H2 valve closed
11/14/2010	6:00:03 PM	BCl3 valve closed
11/14/2010	6:00:03 PM	PH3 valve closed
11/14/2010	6:00:03 PM	SiCl4 pre valve closed
11/14/2010	6:00:03 PM	SiCl4 post valve closed
11/14/2010	6:00:03 PM	Main Vac valve closed
11/14/2010	6:00:03 PM	Bubbler valve closed
11/14/2010	6:00:03 PM	Bypass valve opened
11/14/2010	6:00:03 PM	Helium MFC set to  0.000000
11/14/2010	6:00:03 PM	H2 MFC set to  0.000000
11/14/2010	6:00:03 PM	BCl3 MFC set to  0.000000
11/14/2010	6:00:03 PM	PHl3 MFC set to  0.000000
11/14/2010	6:00:03 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:00:03 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:00:04 PM	Tube furnace set to 0
11/14/2010	6:00:40 PM	Helium valve closed
11/14/2010	6:00:40 PM	H2 valve closed
11/14/2010	6:00:40 PM	BCl3 valve closed
11/14/2010	6:00:40 PM	PH3 valve closed
11/14/2010	6:00:40 PM	SiCl4 pre valve closed
11/14/2010	6:00:40 PM	SiCl4 post valve closed
11/14/2010	6:00:40 PM	Bubbler valve closed
11/14/2010	6:00:40 PM	Main Vac valve opened
11/14/2010	6:00:40 PM	Bypass valve opened
11/14/2010	6:00:40 PM	Helium MFC set to  0.000000
11/14/2010	6:00:40 PM	H2 MFC set to  0.000000
11/14/2010	6:00:40 PM	BCl3 MFC set to  0.000000
11/14/2010	6:00:40 PM	PHl3 MFC set to  0.000000
11/14/2010	6:00:40 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:00:40 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:00:40 PM	Tube furnace set to 0
11/14/2010	6:00:41 PM	Run finished at 6:00 PM
11/14/2010	6:00:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	6:00:47 PM	Helium MFC set to  100.000000
11/14/2010	6:00:51 PM	Helium valve opened
11/14/2010	6:07:20 PM	Helium valve closed
11/14/2010	6:07:23 PM	Helium MFC set to  0.000000
11/14/2010	6:07:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/14/2010	6:08:05 PM	Recipe started at 6:07 PM
11/14/2010	6:08:05 PM	Helium valve closed
11/14/2010	6:08:05 PM	H2 valve closed
11/14/2010	6:08:05 PM	BCl3 valve closed
11/14/2010	6:08:05 PM	PH3 valve closed
11/14/2010	6:08:05 PM	SiCl4 pre valve closed
11/14/2010	6:08:05 PM	SiCl4 post valve closed
11/14/2010	6:08:05 PM	Main Vac valve closed
11/14/2010	6:08:05 PM	Bubbler valve closed
11/14/2010	6:08:05 PM	Bypass valve opened
11/14/2010	6:08:05 PM	Helium MFC set to  0.000000
11/14/2010	6:08:05 PM	H2 MFC set to  0.000000
11/14/2010	6:08:05 PM	BCl3 MFC set to  0.000000
11/14/2010	6:08:05 PM	PHl3 MFC set to  0.000000
11/14/2010	6:08:05 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:08:05 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:08:05 PM	Tube furnace set to 0
11/14/2010	6:08:06 PM	Helium valve closed
11/14/2010	6:08:06 PM	H2 valve closed
11/14/2010	6:08:06 PM	BCl3 valve closed
11/14/2010	6:08:06 PM	PH3 valve closed
11/14/2010	6:08:06 PM	SiCl4 pre valve closed
11/14/2010	6:08:06 PM	SiCl4 post valve closed
11/14/2010	6:08:06 PM	Bubbler valve closed
11/14/2010	6:08:06 PM	Main Vac valve opened
11/14/2010	6:08:06 PM	Bypass valve opened
11/14/2010	6:08:06 PM	Helium MFC set to  0.000000
11/14/2010	6:08:06 PM	H2 MFC set to  0.000000
11/14/2010	6:08:06 PM	BCl3 MFC set to  0.000000
11/14/2010	6:08:06 PM	PHl3 MFC set to  0.000000
11/14/2010	6:08:06 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:08:06 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:08:06 PM	Tube furnace set to 0
11/14/2010	6:09:06 PM	H2 valve closed
11/14/2010	6:09:06 PM	BCl3 valve closed
11/14/2010	6:09:06 PM	PH3 valve closed
11/14/2010	6:09:06 PM	SiCl4 pre valve closed
11/14/2010	6:09:06 PM	SiCl4 post valve closed
11/14/2010	6:09:06 PM	Bubbler valve closed
11/14/2010	6:09:06 PM	Helium valve opened
11/14/2010	6:09:06 PM	Main Vac valve opened
11/14/2010	6:09:06 PM	Bypass valve opened
11/14/2010	6:09:06 PM	Helium MFC set to  100.000000
11/14/2010	6:09:06 PM	H2 MFC set to  0.000000
11/14/2010	6:09:06 PM	BCl3 MFC set to  0.000000
11/14/2010	6:09:06 PM	PHl3 MFC set to  0.000000
11/14/2010	6:09:06 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:09:06 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:09:06 PM	Tube furnace set to 0
11/14/2010	6:10:06 PM	Helium valve closed
11/14/2010	6:10:06 PM	H2 valve closed
11/14/2010	6:10:06 PM	BCl3 valve closed
11/14/2010	6:10:06 PM	PH3 valve closed
11/14/2010	6:10:06 PM	SiCl4 pre valve closed
11/14/2010	6:10:06 PM	SiCl4 post valve closed
11/14/2010	6:10:06 PM	Bubbler valve closed
11/14/2010	6:10:06 PM	Main Vac valve opened
11/14/2010	6:10:06 PM	Bypass valve opened
11/14/2010	6:10:06 PM	Helium MFC set to  0.000000
11/14/2010	6:10:06 PM	H2 MFC set to  0.000000
11/14/2010	6:10:06 PM	BCl3 MFC set to  0.000000
11/14/2010	6:10:06 PM	PHl3 MFC set to  0.000000
11/14/2010	6:10:06 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:10:06 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:10:06 PM	Tube furnace set to 0
11/14/2010	6:11:06 PM	H2 valve closed
11/14/2010	6:11:06 PM	BCl3 valve closed
11/14/2010	6:11:06 PM	PH3 valve closed
11/14/2010	6:11:06 PM	SiCl4 pre valve closed
11/14/2010	6:11:06 PM	SiCl4 post valve closed
11/14/2010	6:11:06 PM	Bubbler valve closed
11/14/2010	6:11:06 PM	Helium valve opened
11/14/2010	6:11:06 PM	Main Vac valve opened
11/14/2010	6:11:06 PM	Bypass valve opened
11/14/2010	6:11:06 PM	Helium MFC set to  100.000000
11/14/2010	6:11:06 PM	H2 MFC set to  0.000000
11/14/2010	6:11:06 PM	BCl3 MFC set to  0.000000
11/14/2010	6:11:06 PM	PHl3 MFC set to  0.000000
11/14/2010	6:11:06 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:11:06 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:11:06 PM	Tube furnace set to 0
11/14/2010	6:12:06 PM	Helium valve closed
11/14/2010	6:12:06 PM	H2 valve closed
11/14/2010	6:12:06 PM	BCl3 valve closed
11/14/2010	6:12:06 PM	PH3 valve closed
11/14/2010	6:12:06 PM	SiCl4 pre valve closed
11/14/2010	6:12:06 PM	SiCl4 post valve closed
11/14/2010	6:12:06 PM	Bubbler valve closed
11/14/2010	6:12:06 PM	Main Vac valve opened
11/14/2010	6:12:06 PM	Bypass valve opened
11/14/2010	6:12:06 PM	Helium MFC set to  0.000000
11/14/2010	6:12:06 PM	H2 MFC set to  0.000000
11/14/2010	6:12:06 PM	BCl3 MFC set to  0.000000
11/14/2010	6:12:06 PM	PHl3 MFC set to  0.000000
11/14/2010	6:12:06 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:12:06 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:12:07 PM	Tube furnace set to 0
11/14/2010	6:13:07 PM	H2 valve closed
11/14/2010	6:13:07 PM	BCl3 valve closed
11/14/2010	6:13:07 PM	PH3 valve closed
11/14/2010	6:13:07 PM	SiCl4 pre valve closed
11/14/2010	6:13:07 PM	SiCl4 post valve closed
11/14/2010	6:13:07 PM	Bubbler valve closed
11/14/2010	6:13:07 PM	Helium valve opened
11/14/2010	6:13:07 PM	Main Vac valve opened
11/14/2010	6:13:07 PM	Bypass valve opened
11/14/2010	6:13:07 PM	Helium MFC set to  100.000000
11/14/2010	6:13:07 PM	H2 MFC set to  0.000000
11/14/2010	6:13:07 PM	BCl3 MFC set to  0.000000
11/14/2010	6:13:07 PM	PHl3 MFC set to  0.000000
11/14/2010	6:13:07 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:13:07 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:13:07 PM	Tube furnace set to 0
11/14/2010	6:14:07 PM	Helium valve closed
11/14/2010	6:14:07 PM	H2 valve closed
11/14/2010	6:14:07 PM	BCl3 valve closed
11/14/2010	6:14:07 PM	PH3 valve closed
11/14/2010	6:14:07 PM	SiCl4 pre valve closed
11/14/2010	6:14:07 PM	SiCl4 post valve closed
11/14/2010	6:14:07 PM	Bubbler valve closed
11/14/2010	6:14:07 PM	Main Vac valve opened
11/14/2010	6:14:07 PM	Bypass valve opened
11/14/2010	6:14:07 PM	Helium MFC set to  0.000000
11/14/2010	6:14:07 PM	H2 MFC set to  0.000000
11/14/2010	6:14:07 PM	BCl3 MFC set to  0.000000
11/14/2010	6:14:07 PM	PHl3 MFC set to  0.000000
11/14/2010	6:14:07 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:14:07 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:14:07 PM	Tube furnace set to 0
11/14/2010	6:15:07 PM	H2 valve closed
11/14/2010	6:15:07 PM	BCl3 valve closed
11/14/2010	6:15:07 PM	PH3 valve closed
11/14/2010	6:15:07 PM	SiCl4 pre valve closed
11/14/2010	6:15:07 PM	SiCl4 post valve closed
11/14/2010	6:15:07 PM	Bubbler valve closed
11/14/2010	6:15:07 PM	Helium valve opened
11/14/2010	6:15:07 PM	Main Vac valve opened
11/14/2010	6:15:07 PM	Bypass valve opened
11/14/2010	6:15:07 PM	Helium MFC set to  100.000000
11/14/2010	6:15:07 PM	H2 MFC set to  0.000000
11/14/2010	6:15:07 PM	BCl3 MFC set to  0.000000
11/14/2010	6:15:07 PM	PHl3 MFC set to  0.000000
11/14/2010	6:15:07 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:15:07 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:15:07 PM	Tube furnace set to 0
11/14/2010	6:16:07 PM	Helium valve closed
11/14/2010	6:16:07 PM	H2 valve closed
11/14/2010	6:16:07 PM	BCl3 valve closed
11/14/2010	6:16:07 PM	PH3 valve closed
11/14/2010	6:16:07 PM	SiCl4 pre valve closed
11/14/2010	6:16:07 PM	SiCl4 post valve closed
11/14/2010	6:16:07 PM	Bubbler valve closed
11/14/2010	6:16:07 PM	Main Vac valve opened
11/14/2010	6:16:07 PM	Bypass valve opened
11/14/2010	6:16:07 PM	Helium MFC set to  0.000000
11/14/2010	6:16:07 PM	H2 MFC set to  0.000000
11/14/2010	6:16:07 PM	BCl3 MFC set to  0.000000
11/14/2010	6:16:07 PM	PHl3 MFC set to  0.000000
11/14/2010	6:16:07 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:16:07 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:16:07 PM	Tube furnace set to 0
11/14/2010	6:17:07 PM	H2 valve closed
11/14/2010	6:17:07 PM	BCl3 valve closed
11/14/2010	6:17:07 PM	PH3 valve closed
11/14/2010	6:17:07 PM	SiCl4 pre valve closed
11/14/2010	6:17:07 PM	SiCl4 post valve closed
11/14/2010	6:17:07 PM	Bubbler valve closed
11/14/2010	6:17:07 PM	Helium valve opened
11/14/2010	6:17:07 PM	Main Vac valve opened
11/14/2010	6:17:07 PM	Bypass valve opened
11/14/2010	6:17:07 PM	Helium MFC set to  100.000000
11/14/2010	6:17:07 PM	H2 MFC set to  0.000000
11/14/2010	6:17:07 PM	BCl3 MFC set to  0.000000
11/14/2010	6:17:07 PM	PHl3 MFC set to  0.000000
11/14/2010	6:17:07 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:17:07 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:17:08 PM	Tube furnace set to 0
11/14/2010	6:18:08 PM	Helium valve closed
11/14/2010	6:18:08 PM	H2 valve closed
11/14/2010	6:18:08 PM	BCl3 valve closed
11/14/2010	6:18:08 PM	PH3 valve closed
11/14/2010	6:18:08 PM	SiCl4 pre valve closed
11/14/2010	6:18:08 PM	SiCl4 post valve closed
11/14/2010	6:18:08 PM	Bubbler valve closed
11/14/2010	6:18:08 PM	Main Vac valve opened
11/14/2010	6:18:08 PM	Bypass valve opened
11/14/2010	6:18:08 PM	Helium MFC set to  0.000000
11/14/2010	6:18:08 PM	H2 MFC set to  0.000000
11/14/2010	6:18:08 PM	BCl3 MFC set to  0.000000
11/14/2010	6:18:08 PM	PHl3 MFC set to  0.000000
11/14/2010	6:18:08 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:18:08 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:18:08 PM	Tube furnace set to 0
11/14/2010	6:19:08 PM	H2 valve closed
11/14/2010	6:19:08 PM	BCl3 valve closed
11/14/2010	6:19:08 PM	PH3 valve closed
11/14/2010	6:19:08 PM	SiCl4 pre valve closed
11/14/2010	6:19:08 PM	SiCl4 post valve closed
11/14/2010	6:19:08 PM	Bubbler valve closed
11/14/2010	6:19:08 PM	Helium valve opened
11/14/2010	6:19:08 PM	Main Vac valve opened
11/14/2010	6:19:08 PM	Bypass valve opened
11/14/2010	6:19:08 PM	Helium MFC set to  100.000000
11/14/2010	6:19:08 PM	H2 MFC set to  0.000000
11/14/2010	6:19:08 PM	BCl3 MFC set to  0.000000
11/14/2010	6:19:08 PM	PHl3 MFC set to  0.000000
11/14/2010	6:19:08 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:19:08 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:19:08 PM	Tube furnace set to 0
11/14/2010	6:20:08 PM	Helium valve closed
11/14/2010	6:20:08 PM	H2 valve closed
11/14/2010	6:20:08 PM	BCl3 valve closed
11/14/2010	6:20:08 PM	PH3 valve closed
11/14/2010	6:20:08 PM	SiCl4 pre valve closed
11/14/2010	6:20:08 PM	SiCl4 post valve closed
11/14/2010	6:20:08 PM	Bubbler valve closed
11/14/2010	6:20:08 PM	Main Vac valve opened
11/14/2010	6:20:08 PM	Bypass valve opened
11/14/2010	6:20:08 PM	Helium MFC set to  0.000000
11/14/2010	6:20:08 PM	H2 MFC set to  0.000000
11/14/2010	6:20:08 PM	BCl3 MFC set to  0.000000
11/14/2010	6:20:08 PM	PHl3 MFC set to  0.000000
11/14/2010	6:20:08 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:20:08 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:20:08 PM	Tube furnace set to 0
11/14/2010	6:21:08 PM	H2 valve closed
11/14/2010	6:21:08 PM	BCl3 valve closed
11/14/2010	6:21:08 PM	PH3 valve closed
11/14/2010	6:21:08 PM	SiCl4 pre valve closed
11/14/2010	6:21:08 PM	SiCl4 post valve closed
11/14/2010	6:21:08 PM	Bubbler valve closed
11/14/2010	6:21:08 PM	Helium valve opened
11/14/2010	6:21:08 PM	Main Vac valve opened
11/14/2010	6:21:08 PM	Bypass valve opened
11/14/2010	6:21:08 PM	Helium MFC set to  100.000000
11/14/2010	6:21:08 PM	H2 MFC set to  0.000000
11/14/2010	6:21:08 PM	BCl3 MFC set to  0.000000
11/14/2010	6:21:08 PM	PHl3 MFC set to  0.000000
11/14/2010	6:21:08 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:21:08 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:21:08 PM	Tube furnace set to 0
11/14/2010	6:22:08 PM	Helium valve closed
11/14/2010	6:22:08 PM	H2 valve closed
11/14/2010	6:22:08 PM	BCl3 valve closed
11/14/2010	6:22:08 PM	PH3 valve closed
11/14/2010	6:22:08 PM	SiCl4 pre valve closed
11/14/2010	6:22:08 PM	SiCl4 post valve closed
11/14/2010	6:22:08 PM	Bubbler valve closed
11/14/2010	6:22:08 PM	Main Vac valve opened
11/14/2010	6:22:08 PM	Bypass valve opened
11/14/2010	6:22:08 PM	Helium MFC set to  0.000000
11/14/2010	6:22:08 PM	H2 MFC set to  0.000000
11/14/2010	6:22:08 PM	BCl3 MFC set to  0.000000
11/14/2010	6:22:08 PM	PHl3 MFC set to  0.000000
11/14/2010	6:22:08 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:22:08 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:22:09 PM	Tube furnace set to 0
11/14/2010	6:23:09 PM	H2 valve closed
11/14/2010	6:23:09 PM	BCl3 valve closed
11/14/2010	6:23:09 PM	PH3 valve closed
11/14/2010	6:23:09 PM	SiCl4 pre valve closed
11/14/2010	6:23:09 PM	SiCl4 post valve closed
11/14/2010	6:23:09 PM	Bubbler valve closed
11/14/2010	6:23:09 PM	Helium valve opened
11/14/2010	6:23:09 PM	Main Vac valve opened
11/14/2010	6:23:09 PM	Bypass valve opened
11/14/2010	6:23:09 PM	Helium MFC set to  100.000000
11/14/2010	6:23:09 PM	H2 MFC set to  0.000000
11/14/2010	6:23:09 PM	BCl3 MFC set to  0.000000
11/14/2010	6:23:09 PM	PHl3 MFC set to  0.000000
11/14/2010	6:23:09 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:23:09 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:23:09 PM	Tube furnace set to 0
11/14/2010	6:23:19 PM	Run aborted at 6:23 PM
11/14/2010	6:23:19 PM	Helium valve closed
11/14/2010	6:23:19 PM	H2 valve closed
11/14/2010	6:23:19 PM	BCl3 valve closed
11/14/2010	6:23:19 PM	PH3 valve closed
11/14/2010	6:23:19 PM	SiCl4 pre valve closed
11/14/2010	6:23:19 PM	SiCl4 post valve closed
11/14/2010	6:23:19 PM	Bypass valve closed
11/14/2010	6:23:19 PM	Main Vac valve closed
11/14/2010	6:23:19 PM	Bubbler valve closed
11/14/2010	6:23:19 PM	Helium MFC set to  0.000000
11/14/2010	6:23:19 PM	H2 MFC set to  0.000000
11/14/2010	6:23:19 PM	BCl3 MFC set to  0.000000
11/14/2010	6:23:19 PM	PHl3 MFC set to  0.000000
11/14/2010	6:23:19 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:23:19 PM	Tube furnace set to 0
11/14/2010	6:23:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/14/2010	6:23:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	6:23:20 PM	Recipe started at 6:23 PM
11/14/2010	6:23:20 PM	Helium valve closed
11/14/2010	6:23:20 PM	H2 valve closed
11/14/2010	6:23:20 PM	BCl3 valve closed
11/14/2010	6:23:20 PM	PH3 valve closed
11/14/2010	6:23:20 PM	SiCl4 pre valve closed
11/14/2010	6:23:20 PM	SiCl4 post valve closed
11/14/2010	6:23:20 PM	Main Vac valve closed
11/14/2010	6:23:20 PM	Bubbler valve closed
11/14/2010	6:23:20 PM	Bypass valve opened
11/14/2010	6:23:20 PM	Helium MFC set to  0.000000
11/14/2010	6:23:20 PM	H2 MFC set to  0.000000
11/14/2010	6:23:20 PM	BCl3 MFC set to  0.000000
11/14/2010	6:23:20 PM	PHl3 MFC set to  0.000000
11/14/2010	6:23:20 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:23:20 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:23:20 PM	Tube furnace set to 0
11/14/2010	6:23:20 PM	Helium valve closed
11/14/2010	6:23:20 PM	H2 valve closed
11/14/2010	6:23:20 PM	BCl3 valve closed
11/14/2010	6:23:20 PM	PH3 valve closed
11/14/2010	6:23:20 PM	SiCl4 pre valve closed
11/14/2010	6:23:20 PM	SiCl4 post valve closed
11/14/2010	6:23:20 PM	Bubbler valve closed
11/14/2010	6:23:20 PM	Main Vac valve opened
11/14/2010	6:23:20 PM	Bypass valve opened
11/14/2010	6:23:20 PM	Helium MFC set to  0.000000
11/14/2010	6:23:20 PM	H2 MFC set to  0.000000
11/14/2010	6:23:20 PM	BCl3 MFC set to  0.000000
11/14/2010	6:23:20 PM	PHl3 MFC set to  0.000000
11/14/2010	6:23:20 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:23:20 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:23:21 PM	Tube furnace set to 0
11/14/2010	6:23:21 PM	Run finished at 6:23 PM
11/14/2010	6:23:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	6:23:24 PM	Helium MFC set to  100.000000
11/14/2010	6:23:25 PM	Helium valve opened
11/14/2010	6:45:44 PM	Helium valve closed
11/14/2010	6:45:46 PM	Helium MFC set to  0.000000
11/14/2010	6:46:35 PM	Recipe started at 6:46 PM
11/14/2010	6:46:35 PM	Helium valve closed
11/14/2010	6:46:35 PM	BCl3 valve closed
11/14/2010	6:46:35 PM	PH3 valve closed
11/14/2010	6:46:35 PM	SiCl4 pre valve closed
11/14/2010	6:46:35 PM	SiCl4 post valve closed
11/14/2010	6:46:35 PM	Main Vac valve closed
11/14/2010	6:46:36 PM	Bypass valve closed
11/14/2010	6:46:36 PM	Bubbler valve closed
11/14/2010	6:46:36 PM	H2 valve opened
11/14/2010	6:46:36 PM	Helium MFC set to  0.000000
11/14/2010	6:46:36 PM	H2 MFC set to  500.000000
11/14/2010	6:46:36 PM	BCl3 MFC set to  0.000000
11/14/2010	6:46:36 PM	PHl3 MFC set to  0.000000
11/14/2010	6:46:36 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:46:36 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:46:36 PM	Tube furnace set to 1000
11/14/2010	6:47:57 PM	Helium valve closed
11/14/2010	6:47:57 PM	BCl3 valve closed
11/14/2010	6:47:57 PM	PH3 valve closed
11/14/2010	6:47:57 PM	SiCl4 pre valve closed
11/14/2010	6:47:57 PM	SiCl4 post valve closed
11/14/2010	6:47:57 PM	Main Vac valve closed
11/14/2010	6:47:57 PM	Bypass valve closed
11/14/2010	6:47:57 PM	H2 valve opened
11/14/2010	6:47:57 PM	Bubbler valve opened
11/14/2010	6:47:57 PM	Helium MFC set to  0.000000
11/14/2010	6:47:57 PM	H2 MFC set to  500.000000
11/14/2010	6:47:57 PM	BCl3 MFC set to  0.000000
11/14/2010	6:47:57 PM	PHl3 MFC set to  0.000000
11/14/2010	6:47:57 PM	SiCl4 MFC set to  0.000000
11/14/2010	6:47:57 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	6:47:57 PM	Tube furnace set to 1000
11/14/2010	7:07:57 PM	Helium valve closed
11/14/2010	7:07:57 PM	PH3 valve closed
11/14/2010	7:07:57 PM	Main Vac valve closed
11/14/2010	7:07:57 PM	Bypass valve closed
11/14/2010	7:07:57 PM	H2 valve opened
11/14/2010	7:07:57 PM	BCl3 valve opened
11/14/2010	7:07:57 PM	SiCl4 pre valve opened
11/14/2010	7:07:57 PM	SiCl4 post valve opened
11/14/2010	7:07:57 PM	Bubbler valve opened
11/14/2010	7:07:57 PM	Helium MFC set to  0.000000
11/14/2010	7:07:57 PM	H2 MFC set to  500.000000
11/14/2010	7:07:57 PM	BCl3 MFC set to  12.000000
11/14/2010	7:07:57 PM	PHl3 MFC set to  0.000000
11/14/2010	7:07:57 PM	SiCl4 MFC set to  50.000000
11/14/2010	7:07:57 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	7:07:57 PM	Tube furnace set to 1000
11/14/2010	7:27:57 PM	Helium valve closed
11/14/2010	7:27:57 PM	BCl3 valve closed
11/14/2010	7:27:57 PM	PH3 valve closed
11/14/2010	7:27:57 PM	SiCl4 pre valve closed
11/14/2010	7:27:57 PM	SiCl4 post valve closed
11/14/2010	7:27:57 PM	Main Vac valve closed
11/14/2010	7:27:57 PM	Bypass valve closed
11/14/2010	7:27:57 PM	H2 valve opened
11/14/2010	7:27:57 PM	Bubbler valve opened
11/14/2010	7:27:57 PM	Helium MFC set to  0.000000
11/14/2010	7:27:57 PM	H2 MFC set to  500.000000
11/14/2010	7:27:57 PM	BCl3 MFC set to  0.000000
11/14/2010	7:27:57 PM	PHl3 MFC set to  0.000000
11/14/2010	7:27:57 PM	SiCl4 MFC set to  0.000000
11/14/2010	7:27:57 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	7:27:57 PM	Tube furnace set to 750
11/14/2010	7:47:57 PM	H2 valve closed
11/14/2010	7:47:57 PM	BCl3 valve closed
11/14/2010	7:47:57 PM	PH3 valve closed
11/14/2010	7:47:57 PM	SiCl4 pre valve closed
11/14/2010	7:47:57 PM	SiCl4 post valve closed
11/14/2010	7:47:57 PM	Main Vac valve closed
11/14/2010	7:47:57 PM	Bypass valve closed
11/14/2010	7:47:57 PM	Helium valve opened
11/14/2010	7:47:57 PM	Bubbler valve opened
11/14/2010	7:47:57 PM	Helium MFC set to  500.000000
11/14/2010	7:47:57 PM	H2 MFC set to  0.000000
11/14/2010	7:47:57 PM	BCl3 MFC set to  0.000000
11/14/2010	7:47:57 PM	PHl3 MFC set to  0.000000
11/14/2010	7:47:57 PM	SiCl4 MFC set to  0.000000
11/14/2010	7:47:57 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	7:47:58 PM	Tube furnace set to 0
11/14/2010	7:50:58 PM	Run aborted at 7:50 PM
11/14/2010	7:50:58 PM	Helium valve closed
11/14/2010	7:50:58 PM	H2 valve closed
11/14/2010	7:50:58 PM	BCl3 valve closed
11/14/2010	7:50:58 PM	PH3 valve closed
11/14/2010	7:50:58 PM	SiCl4 pre valve closed
11/14/2010	7:50:58 PM	SiCl4 post valve closed
11/14/2010	7:50:58 PM	Bypass valve closed
11/14/2010	7:50:58 PM	Main Vac valve closed
11/14/2010	7:50:58 PM	Bubbler valve closed
11/14/2010	7:50:58 PM	Helium MFC set to  0.000000
11/14/2010	7:50:58 PM	H2 MFC set to  0.000000
11/14/2010	7:50:58 PM	BCl3 MFC set to  0.000000
11/14/2010	7:50:58 PM	PHl3 MFC set to  0.000000
11/14/2010	7:50:58 PM	SiCl4 MFC set to  0.000000
11/14/2010	7:50:58 PM	Tube furnace set to 0
11/14/2010	7:50:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	7:51:00 PM	Recipe started at 7:51 PM
11/14/2010	7:51:00 PM	H2 valve closed
11/14/2010	7:51:00 PM	BCl3 valve closed
11/14/2010	7:51:00 PM	PH3 valve closed
11/14/2010	7:51:00 PM	SiCl4 pre valve closed
11/14/2010	7:51:00 PM	SiCl4 post valve closed
11/14/2010	7:51:00 PM	Main Vac valve closed
11/14/2010	7:51:00 PM	Bypass valve closed
11/14/2010	7:51:00 PM	Bubbler valve closed
11/14/2010	7:51:00 PM	Helium valve opened
11/14/2010	7:51:00 PM	Helium MFC set to  500.000000
11/14/2010	7:51:00 PM	H2 MFC set to  0.000000
11/14/2010	7:51:00 PM	BCl3 MFC set to  0.000000
11/14/2010	7:51:00 PM	PHl3 MFC set to  0.000000
11/14/2010	7:51:00 PM	SiCl4 MFC set to  0.000000
11/14/2010	7:51:00 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	7:51:00 PM	Tube furnace set to 0
11/14/2010	7:51:00 PM	Helium valve closed
11/14/2010	7:51:00 PM	H2 valve closed
11/14/2010	7:51:00 PM	BCl3 valve closed
11/14/2010	7:51:00 PM	PH3 valve closed
11/14/2010	7:51:00 PM	SiCl4 pre valve closed
11/14/2010	7:51:00 PM	SiCl4 post valve closed
11/14/2010	7:51:00 PM	Main Vac valve closed
11/14/2010	7:51:00 PM	Bypass valve closed
11/14/2010	7:51:00 PM	Bubbler valve closed
11/14/2010	7:51:00 PM	Helium MFC set to  0.000000
11/14/2010	7:51:00 PM	H2 MFC set to  0.000000
11/14/2010	7:51:00 PM	BCl3 MFC set to  0.000000
11/14/2010	7:51:00 PM	PHl3 MFC set to  0.000000
11/14/2010	7:51:00 PM	SiCl4 MFC set to  0.000000
11/14/2010	7:51:00 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	7:51:01 PM	Tube furnace set to 0
11/14/2010	7:51:01 PM	Run finished at 7:51 PM
11/14/2010	7:51:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	7:55:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	7:55:40 PM	Recipe started at 7:55 PM
11/14/2010	7:55:40 PM	Helium valve closed
11/14/2010	7:55:40 PM	H2 valve closed
11/14/2010	7:55:40 PM	BCl3 valve closed
11/14/2010	7:55:40 PM	PH3 valve closed
11/14/2010	7:55:40 PM	SiCl4 pre valve closed
11/14/2010	7:55:40 PM	SiCl4 post valve closed
11/14/2010	7:55:40 PM	Main Vac valve closed
11/14/2010	7:55:40 PM	Bubbler valve closed
11/14/2010	7:55:40 PM	Bypass valve opened
11/14/2010	7:55:40 PM	Helium MFC set to  0.000000
11/14/2010	7:55:40 PM	H2 MFC set to  0.000000
11/14/2010	7:55:40 PM	BCl3 MFC set to  0.000000
11/14/2010	7:55:40 PM	PHl3 MFC set to  0.000000
11/14/2010	7:55:40 PM	SiCl4 MFC set to  0.000000
11/14/2010	7:55:40 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	7:55:40 PM	Tube furnace set to 0
11/14/2010	7:56:29 PM	Helium valve closed
11/14/2010	7:56:29 PM	H2 valve closed
11/14/2010	7:56:29 PM	BCl3 valve closed
11/14/2010	7:56:29 PM	PH3 valve closed
11/14/2010	7:56:29 PM	SiCl4 pre valve closed
11/14/2010	7:56:29 PM	SiCl4 post valve closed
11/14/2010	7:56:29 PM	Bubbler valve closed
11/14/2010	7:56:29 PM	Main Vac valve opened
11/14/2010	7:56:29 PM	Bypass valve opened
11/14/2010	7:56:29 PM	Helium MFC set to  0.000000
11/14/2010	7:56:29 PM	H2 MFC set to  0.000000
11/14/2010	7:56:29 PM	BCl3 MFC set to  0.000000
11/14/2010	7:56:29 PM	PHl3 MFC set to  0.000000
11/14/2010	7:56:29 PM	SiCl4 MFC set to  0.000000
11/14/2010	7:56:29 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	7:56:29 PM	Tube furnace set to 0
11/14/2010	7:56:30 PM	Run finished at 7:56 PM
11/14/2010	7:56:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	7:57:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	7:57:54 PM	Recipe started at 7:57 PM
11/14/2010	7:57:54 PM	H2 valve closed
11/14/2010	7:57:54 PM	BCl3 valve closed
11/14/2010	7:57:54 PM	PH3 valve closed
11/14/2010	7:57:54 PM	SiCl4 pre valve closed
11/14/2010	7:57:54 PM	SiCl4 post valve closed
11/14/2010	7:57:54 PM	Main Vac valve closed
11/14/2010	7:57:54 PM	Bypass valve closed
11/14/2010	7:57:54 PM	Bubbler valve closed
11/14/2010	7:57:54 PM	Helium valve opened
11/14/2010	7:57:54 PM	Helium MFC set to  500.000000
11/14/2010	7:57:54 PM	H2 MFC set to  0.000000
11/14/2010	7:57:54 PM	BCl3 MFC set to  0.000000
11/14/2010	7:57:54 PM	PHl3 MFC set to  0.000000
11/14/2010	7:57:54 PM	SiCl4 MFC set to  0.000000
11/14/2010	7:57:54 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	7:57:55 PM	Tube furnace set to 0
11/14/2010	7:59:11 PM	Helium valve closed
11/14/2010	7:59:11 PM	H2 valve closed
11/14/2010	7:59:11 PM	BCl3 valve closed
11/14/2010	7:59:11 PM	PH3 valve closed
11/14/2010	7:59:11 PM	SiCl4 pre valve closed
11/14/2010	7:59:11 PM	SiCl4 post valve closed
11/14/2010	7:59:11 PM	Main Vac valve closed
11/14/2010	7:59:11 PM	Bypass valve closed
11/14/2010	7:59:11 PM	Bubbler valve closed
11/14/2010	7:59:11 PM	Helium MFC set to  0.000000
11/14/2010	7:59:11 PM	H2 MFC set to  0.000000
11/14/2010	7:59:11 PM	BCl3 MFC set to  0.000000
11/14/2010	7:59:11 PM	PHl3 MFC set to  0.000000
11/14/2010	7:59:11 PM	SiCl4 MFC set to  0.000000
11/14/2010	7:59:11 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	7:59:11 PM	Tube furnace set to 0
11/14/2010	7:59:11 PM	Run finished at 7:59 PM
11/14/2010	7:59:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	7:59:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	7:59:27 PM	Recipe started at 7:59 PM
11/14/2010	7:59:27 PM	Helium valve closed
11/14/2010	7:59:27 PM	H2 valve closed
11/14/2010	7:59:27 PM	BCl3 valve closed
11/14/2010	7:59:27 PM	PH3 valve closed
11/14/2010	7:59:27 PM	SiCl4 pre valve closed
11/14/2010	7:59:27 PM	SiCl4 post valve closed
11/14/2010	7:59:27 PM	Main Vac valve closed
11/14/2010	7:59:27 PM	Bubbler valve closed
11/14/2010	7:59:27 PM	Bypass valve opened
11/14/2010	7:59:27 PM	Helium MFC set to  0.000000
11/14/2010	7:59:27 PM	H2 MFC set to  0.000000
11/14/2010	7:59:27 PM	BCl3 MFC set to  0.000000
11/14/2010	7:59:27 PM	PHl3 MFC set to  0.000000
11/14/2010	7:59:27 PM	SiCl4 MFC set to  0.000000
11/14/2010	7:59:27 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	7:59:27 PM	Tube furnace set to 0
11/14/2010	8:00:03 PM	Helium valve closed
11/14/2010	8:00:03 PM	H2 valve closed
11/14/2010	8:00:03 PM	BCl3 valve closed
11/14/2010	8:00:03 PM	PH3 valve closed
11/14/2010	8:00:03 PM	SiCl4 pre valve closed
11/14/2010	8:00:03 PM	SiCl4 post valve closed
11/14/2010	8:00:03 PM	Bubbler valve closed
11/14/2010	8:00:03 PM	Main Vac valve opened
11/14/2010	8:00:03 PM	Bypass valve opened
11/14/2010	8:00:03 PM	Helium MFC set to  0.000000
11/14/2010	8:00:03 PM	H2 MFC set to  0.000000
11/14/2010	8:00:03 PM	BCl3 MFC set to  0.000000
11/14/2010	8:00:03 PM	PHl3 MFC set to  0.000000
11/14/2010	8:00:03 PM	SiCl4 MFC set to  0.000000
11/14/2010	8:00:03 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	8:00:03 PM	Tube furnace set to 0
11/14/2010	8:00:03 PM	Run finished at 8:00 PM
11/14/2010	8:00:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	8:00:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	8:00:32 PM	Recipe started at 8:00 PM
11/14/2010	8:00:32 PM	H2 valve closed
11/14/2010	8:00:32 PM	BCl3 valve closed
11/14/2010	8:00:32 PM	PH3 valve closed
11/14/2010	8:00:32 PM	SiCl4 pre valve closed
11/14/2010	8:00:32 PM	SiCl4 post valve closed
11/14/2010	8:00:32 PM	Main Vac valve closed
11/14/2010	8:00:32 PM	Bypass valve closed
11/14/2010	8:00:32 PM	Bubbler valve closed
11/14/2010	8:00:32 PM	Helium valve opened
11/14/2010	8:00:32 PM	Helium MFC set to  500.000000
11/14/2010	8:00:32 PM	H2 MFC set to  0.000000
11/14/2010	8:00:32 PM	BCl3 MFC set to  0.000000
11/14/2010	8:00:32 PM	PHl3 MFC set to  0.000000
11/14/2010	8:00:32 PM	SiCl4 MFC set to  0.000000
11/14/2010	8:00:32 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	8:00:32 PM	Tube furnace set to 0
11/14/2010	8:01:49 PM	Helium valve closed
11/14/2010	8:01:49 PM	H2 valve closed
11/14/2010	8:01:49 PM	BCl3 valve closed
11/14/2010	8:01:49 PM	PH3 valve closed
11/14/2010	8:01:49 PM	SiCl4 pre valve closed
11/14/2010	8:01:49 PM	SiCl4 post valve closed
11/14/2010	8:01:49 PM	Main Vac valve closed
11/14/2010	8:01:49 PM	Bypass valve closed
11/14/2010	8:01:49 PM	Bubbler valve closed
11/14/2010	8:01:49 PM	Helium MFC set to  0.000000
11/14/2010	8:01:49 PM	H2 MFC set to  0.000000
11/14/2010	8:01:49 PM	BCl3 MFC set to  0.000000
11/14/2010	8:01:49 PM	PHl3 MFC set to  0.000000
11/14/2010	8:01:49 PM	SiCl4 MFC set to  0.000000
11/14/2010	8:01:49 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	8:01:49 PM	Tube furnace set to 0
11/14/2010	8:01:49 PM	Run finished at 8:01 PM
11/14/2010	8:01:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	8:01:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	8:01:52 PM	Recipe started at 8:01 PM
11/14/2010	8:01:52 PM	Helium valve closed
11/14/2010	8:01:52 PM	H2 valve closed
11/14/2010	8:01:52 PM	BCl3 valve closed
11/14/2010	8:01:52 PM	PH3 valve closed
11/14/2010	8:01:52 PM	SiCl4 pre valve closed
11/14/2010	8:01:52 PM	SiCl4 post valve closed
11/14/2010	8:01:52 PM	Main Vac valve closed
11/14/2010	8:01:52 PM	Bubbler valve closed
11/14/2010	8:01:52 PM	Bypass valve opened
11/14/2010	8:01:52 PM	Helium MFC set to  0.000000
11/14/2010	8:01:52 PM	H2 MFC set to  0.000000
11/14/2010	8:01:52 PM	BCl3 MFC set to  0.000000
11/14/2010	8:01:52 PM	PHl3 MFC set to  0.000000
11/14/2010	8:01:52 PM	SiCl4 MFC set to  0.000000
11/14/2010	8:01:52 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	8:01:52 PM	Tube furnace set to 0
11/14/2010	8:02:28 PM	Helium valve closed
11/14/2010	8:02:28 PM	H2 valve closed
11/14/2010	8:02:28 PM	BCl3 valve closed
11/14/2010	8:02:28 PM	PH3 valve closed
11/14/2010	8:02:28 PM	SiCl4 pre valve closed
11/14/2010	8:02:28 PM	SiCl4 post valve closed
11/14/2010	8:02:28 PM	Bubbler valve closed
11/14/2010	8:02:28 PM	Main Vac valve opened
11/14/2010	8:02:28 PM	Bypass valve opened
11/14/2010	8:02:28 PM	Helium MFC set to  0.000000
11/14/2010	8:02:28 PM	H2 MFC set to  0.000000
11/14/2010	8:02:28 PM	BCl3 MFC set to  0.000000
11/14/2010	8:02:28 PM	PHl3 MFC set to  0.000000
11/14/2010	8:02:28 PM	SiCl4 MFC set to  0.000000
11/14/2010	8:02:28 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	8:02:28 PM	Tube furnace set to 0
11/14/2010	8:02:28 PM	Run finished at 8:02 PM
11/14/2010	8:02:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	8:02:35 PM	Helium MFC set to  100.000000
11/14/2010	8:02:36 PM	Helium valve opened
11/14/2010	8:17:47 PM	Helium valve closed
11/14/2010	8:18:28 PM	Helium valve opened
11/14/2010	8:26:50 PM	Helium valve closed
11/14/2010	8:27:36 PM	Helium valve opened
11/14/2010	8:32:00 PM	Helium valve closed
11/14/2010	8:32:49 PM	Recipe started at 8:32 PM
11/14/2010	8:32:49 PM	Helium valve closed
11/14/2010	8:32:49 PM	BCl3 valve closed
11/14/2010	8:32:49 PM	PH3 valve closed
11/14/2010	8:32:49 PM	SiCl4 pre valve closed
11/14/2010	8:32:49 PM	SiCl4 post valve closed
11/14/2010	8:32:49 PM	Main Vac valve closed
11/14/2010	8:32:49 PM	Bypass valve closed
11/14/2010	8:32:49 PM	Bubbler valve closed
11/14/2010	8:32:49 PM	H2 valve opened
11/14/2010	8:32:49 PM	Helium MFC set to  0.000000
11/14/2010	8:32:49 PM	H2 MFC set to  500.000000
11/14/2010	8:32:49 PM	BCl3 MFC set to  0.000000
11/14/2010	8:32:49 PM	PHl3 MFC set to  0.000000
11/14/2010	8:32:49 PM	SiCl4 MFC set to  0.000000
11/14/2010	8:32:49 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	8:32:49 PM	Tube furnace set to 1000
11/14/2010	8:34:11 PM	Helium valve closed
11/14/2010	8:34:11 PM	BCl3 valve closed
11/14/2010	8:34:11 PM	PH3 valve closed
11/14/2010	8:34:11 PM	SiCl4 pre valve closed
11/14/2010	8:34:11 PM	SiCl4 post valve closed
11/14/2010	8:34:11 PM	Main Vac valve closed
11/14/2010	8:34:11 PM	Bypass valve closed
11/14/2010	8:34:11 PM	H2 valve opened
11/14/2010	8:34:11 PM	Bubbler valve opened
11/14/2010	8:34:11 PM	Helium MFC set to  0.000000
11/14/2010	8:34:11 PM	H2 MFC set to  500.000000
11/14/2010	8:34:11 PM	BCl3 MFC set to  0.000000
11/14/2010	8:34:11 PM	PHl3 MFC set to  0.000000
11/14/2010	8:34:11 PM	SiCl4 MFC set to  0.000000
11/14/2010	8:34:11 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	8:34:11 PM	Tube furnace set to 1000
11/14/2010	8:54:11 PM	Helium valve closed
11/14/2010	8:54:11 PM	PH3 valve closed
11/14/2010	8:54:11 PM	Main Vac valve closed
11/14/2010	8:54:11 PM	Bypass valve closed
11/14/2010	8:54:11 PM	H2 valve opened
11/14/2010	8:54:11 PM	BCl3 valve opened
11/14/2010	8:54:11 PM	SiCl4 pre valve opened
11/14/2010	8:54:11 PM	SiCl4 post valve opened
11/14/2010	8:54:11 PM	Bubbler valve opened
11/14/2010	8:54:11 PM	Helium MFC set to  0.000000
11/14/2010	8:54:11 PM	H2 MFC set to  500.000000
11/14/2010	8:54:11 PM	BCl3 MFC set to  12.000000
11/14/2010	8:54:11 PM	PHl3 MFC set to  0.000000
11/14/2010	8:54:11 PM	SiCl4 MFC set to  50.000000
11/14/2010	8:54:11 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	8:54:11 PM	Tube furnace set to 1000
11/14/2010	9:07:31 PM	Helium valve closed
11/14/2010	9:07:31 PM	BCl3 valve closed
11/14/2010	9:07:31 PM	PH3 valve closed
11/14/2010	9:07:31 PM	SiCl4 pre valve closed
11/14/2010	9:07:31 PM	SiCl4 post valve closed
11/14/2010	9:07:31 PM	Main Vac valve closed
11/14/2010	9:07:31 PM	Bypass valve closed
11/14/2010	9:07:31 PM	H2 valve opened
11/14/2010	9:07:31 PM	Bubbler valve opened
11/14/2010	9:07:31 PM	Helium MFC set to  0.000000
11/14/2010	9:07:31 PM	H2 MFC set to  500.000000
11/14/2010	9:07:31 PM	BCl3 MFC set to  0.000000
11/14/2010	9:07:31 PM	PHl3 MFC set to  0.000000
11/14/2010	9:07:31 PM	SiCl4 MFC set to  0.000000
11/14/2010	9:07:31 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	9:07:31 PM	Tube furnace set to 750
11/14/2010	9:27:31 PM	H2 valve closed
11/14/2010	9:27:31 PM	BCl3 valve closed
11/14/2010	9:27:31 PM	PH3 valve closed
11/14/2010	9:27:31 PM	SiCl4 pre valve closed
11/14/2010	9:27:31 PM	SiCl4 post valve closed
11/14/2010	9:27:31 PM	Main Vac valve closed
11/14/2010	9:27:31 PM	Bypass valve closed
11/14/2010	9:27:31 PM	Helium valve opened
11/14/2010	9:27:31 PM	Bubbler valve opened
11/14/2010	9:27:31 PM	Helium MFC set to  500.000000
11/14/2010	9:27:31 PM	H2 MFC set to  0.000000
11/14/2010	9:27:31 PM	BCl3 MFC set to  0.000000
11/14/2010	9:27:31 PM	PHl3 MFC set to  0.000000
11/14/2010	9:27:31 PM	SiCl4 MFC set to  0.000000
11/14/2010	9:27:31 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	9:27:31 PM	Tube furnace set to 0
11/14/2010	9:28:24 PM	Helium valve closed
11/14/2010	9:28:24 PM	H2 valve closed
11/14/2010	9:28:24 PM	BCl3 valve closed
11/14/2010	9:28:24 PM	PH3 valve closed
11/14/2010	9:28:24 PM	SiCl4 pre valve closed
11/14/2010	9:28:24 PM	SiCl4 post valve closed
11/14/2010	9:28:24 PM	Main Vac valve closed
11/14/2010	9:28:24 PM	Bypass valve closed
11/14/2010	9:28:24 PM	Bubbler valve closed
11/14/2010	9:28:24 PM	Helium MFC set to  0.000000
11/14/2010	9:28:24 PM	H2 MFC set to  0.000000
11/14/2010	9:28:24 PM	BCl3 MFC set to  0.000000
11/14/2010	9:28:24 PM	PHl3 MFC set to  0.000000
11/14/2010	9:28:24 PM	SiCl4 MFC set to  0.000000
11/14/2010	9:28:24 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	9:28:24 PM	Tube furnace set to 0
11/14/2010	9:28:24 PM	Run finished at 9:28 PM
11/14/2010	9:28:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	9:28:28 PM	Recipe started at 9:28 PM
11/14/2010	9:28:28 PM	H2 valve closed
11/14/2010	9:28:28 PM	BCl3 valve closed
11/14/2010	9:28:28 PM	PH3 valve closed
11/14/2010	9:28:28 PM	SiCl4 pre valve closed
11/14/2010	9:28:28 PM	SiCl4 post valve closed
11/14/2010	9:28:28 PM	Main Vac valve closed
11/14/2010	9:28:28 PM	Bypass valve closed
11/14/2010	9:28:28 PM	Bubbler valve closed
11/14/2010	9:28:28 PM	Helium valve opened
11/14/2010	9:28:28 PM	Helium MFC set to  500.000000
11/14/2010	9:28:28 PM	H2 MFC set to  0.000000
11/14/2010	9:28:28 PM	BCl3 MFC set to  0.000000
11/14/2010	9:28:28 PM	PHl3 MFC set to  0.000000
11/14/2010	9:28:28 PM	SiCl4 MFC set to  0.000000
11/14/2010	9:28:28 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	9:28:28 PM	Tube furnace set to 0
11/14/2010	9:28:29 PM	Helium valve closed
11/14/2010	9:28:29 PM	H2 valve closed
11/14/2010	9:28:29 PM	BCl3 valve closed
11/14/2010	9:28:29 PM	PH3 valve closed
11/14/2010	9:28:29 PM	SiCl4 pre valve closed
11/14/2010	9:28:29 PM	SiCl4 post valve closed
11/14/2010	9:28:29 PM	Main Vac valve closed
11/14/2010	9:28:29 PM	Bypass valve closed
11/14/2010	9:28:29 PM	Bubbler valve closed
11/14/2010	9:28:29 PM	Helium MFC set to  0.000000
11/14/2010	9:28:29 PM	H2 MFC set to  0.000000
11/14/2010	9:28:29 PM	BCl3 MFC set to  0.000000
11/14/2010	9:28:29 PM	PHl3 MFC set to  0.000000
11/14/2010	9:28:29 PM	SiCl4 MFC set to  0.000000
11/14/2010	9:28:29 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	9:28:29 PM	Tube furnace set to 0
11/14/2010	9:28:29 PM	Run finished at 9:28 PM
11/14/2010	9:28:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2010	9:32:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2010	9:32:15 PM	Recipe started at 9:32 PM
11/14/2010	9:32:15 PM	Helium valve closed
11/14/2010	9:32:15 PM	H2 valve closed
11/14/2010	9:32:15 PM	BCl3 valve closed
11/14/2010	9:32:15 PM	PH3 valve closed
11/14/2010	9:32:15 PM	SiCl4 pre valve closed
11/14/2010	9:32:15 PM	SiCl4 post valve closed
11/14/2010	9:32:15 PM	Main Vac valve closed
11/14/2010	9:32:15 PM	Bubbler valve closed
11/14/2010	9:32:15 PM	Bypass valve opened
11/14/2010	9:32:15 PM	Helium MFC set to  0.000000
11/14/2010	9:32:15 PM	H2 MFC set to  0.000000
11/14/2010	9:32:15 PM	BCl3 MFC set to  0.000000
11/14/2010	9:32:15 PM	PHl3 MFC set to  0.000000
11/14/2010	9:32:15 PM	SiCl4 MFC set to  0.000000
11/14/2010	9:32:15 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	9:32:15 PM	Tube furnace set to 0
11/14/2010	9:33:00 PM	Helium valve closed
11/14/2010	9:33:00 PM	H2 valve closed
11/14/2010	9:33:00 PM	BCl3 valve closed
11/14/2010	9:33:00 PM	PH3 valve closed
11/14/2010	9:33:00 PM	SiCl4 pre valve closed
11/14/2010	9:33:00 PM	SiCl4 post valve closed
11/14/2010	9:33:00 PM	Bubbler valve closed
11/14/2010	9:33:00 PM	Main Vac valve opened
11/14/2010	9:33:00 PM	Bypass valve opened
11/14/2010	9:33:00 PM	Helium MFC set to  0.000000
11/14/2010	9:33:00 PM	H2 MFC set to  0.000000
11/14/2010	9:33:00 PM	BCl3 MFC set to  0.000000
11/14/2010	9:33:00 PM	PHl3 MFC set to  0.000000
11/14/2010	9:33:00 PM	SiCl4 MFC set to  0.000000
11/14/2010	9:33:00 PM	Bypass solenoid MFC set to  0.000000
11/14/2010	9:33:00 PM	Tube furnace set to 0
11/14/2010	9:33:01 PM	Run finished at 9:33 PM
11/14/2010	9:33:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
